A method for preparing high concentration gradient azo single crystal conductive film by diffusion method

A conductive thin film, high-concentration technology, used in single crystal growth, single crystal growth, chemical instruments and methods, etc., can solve problems such as unfavorable large-scale industrialization, poor film formation quality, slow deposition speed, etc., to achieve uniform gradient, conductive The effect of excellent performance and easy process control
CN105132875BInactive Publication Date: 2017-07-28LIAONING UNIVERSITY OF TECHNOLOGY
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
LIAONING UNIVERSITY OF TECHNOLOGY
Publication Date
2017-07-28
Estimated Expiration
Not applicable · inactive patent

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Abstract

A method for preparing a high-concentration gradient AZO single-crystal conductive film by a diffusion method. Single-crystal silicon is used as a substrate, and the target materials used are ZnO targets and Al targets. Sputtering deposition of AZO layer and ZnO layer is carried out. The power of the target remains unchanged during sputtering deposition. The Al element deposition is controlled by regularly adjusting the Al target baffle. Each time the aluminum target baffle is opened, the ZnO target is sputtered separately. The time is increasing, after the ZnO target is sputtered alone, the aluminum baffle is opened, and the Al target and the ZnO target are co-sputtered. After the deposition is completed, annealing is performed to obtain a gradient AZO film. The advantages are: simple process, low cost, easy process control, gradient AZO single crystal film prepared by diffusion method, large gradient change of gradient doping concentration, uniform gradient, high crystal quality, good single crystal performance, smooth film surface, and excellent electrical conductivity , suitable as a passivation layer for thin film solar cells.
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Description

technical field

[0001] The invention belongs to the field of preparation of transparent conductive oxide films, in particular to a method for preparing high-concentration gradient AZO single-crystal conductive films by a diffusion method. Background technique

[0002] With the development of semiconductor, computer, solar energy and other industries, a new functional material—transparent conductive oxide film (TCO film for short) has emerged and developed. Among them, aluminum-doped zinc oxide (AZO) transparent conductive film has become the best transparent conductive film material so far because of its abundant natural resources, simple production process, low cost, non-toxicity and stable performance, especially the gradient AZO single crystal film because of its With the advantages of no stress on the interface and fast electron transmission, it has important application prospects in solar cells, liquid crystal displays, and thermal mirrors. Since the components of the ...

Claims

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