A method for preparing high-concentration gradient azo single-crystal conductive thin films by direct current/radio frequency co-sputtering

A conductive thin film and co-sputtering technology, which is applied in the field of preparation of bright conductive oxide thin films, can solve the problems of unfavorable large-scale industrialization, poor film quality, and high production costs, and achieve excellent crystal silicon passivation performance, uniform gradient, and low cost. cheap effect
CN105132874BInactive Publication Date: 2017-09-26LIAONING UNIVERSITY OF TECHNOLOGY
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Patents(China)
Current Assignee / Owner
LIAONING UNIVERSITY OF TECHNOLOGY
Publication Date
2017-09-26
Estimated Expiration
Not applicable Β· inactive patent

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Abstract

A method for preparing high-concentration gradient AZO single-crystal conductive films by DC / RF co-sputtering. The targets used for sputtering are ZnO targets and Al targets. The zinc oxide targets are installed on the radio-frequency targets of magnetron sputtering equipment. The target is installed on the DC target of the magnetron sputtering equipment, and the single crystal silicon substrate is installed on the sample stage at the top of the vacuum chamber of the magnetron sputtering equipment; the gradient AZO film is prepared by the co-sputtering method, and the initial doping amount of Al The power of the Al target is 40% to 60%, and the power of the Al target is constantly changing during the entire coating process. As the thickness of the film deposited by sputtering increases, the power of the Al target decreases, and the doping amount of Al decreases to 3%. , to prepare gradient AZO films. The method has the advantages of uniform film gradient, good single crystal orientation, excellent optical and electrical properties, low cost and suitable for large-scale production.
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Description

technical field

[0001] The invention belongs to the field of preparation of bright conductive oxide thin films, in particular to a method for preparing high-concentration gradient AZO single crystal conductive thin films by direct current / radio frequency co-sputtering. Background technique

[0002] The energy used by human beings in life and production mainly comes from fossil fuels such as coal, oil, and natural gas. With the development of society, there is an increasing demand for energy, the gradual depletion of fossil fuels such as petroleum, and the increasingly serious problems of environmental pollution. Solar energy is widely distributed, inexhaustible, and inexhaustible. The environment is non-polluting, so its development and utilization have gradually attracted people's attention.

[0003] In the photovoltaic industry, crystalline silicon solar cells account for 80% of the photovoltaic market, occupying a dominant position in the photovoltaic market. However, t...

Claims

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