Automatic material transfer system and method

A material conveying system and the technology of the conveying system are applied in the field of automatic material conveying systems using lifting devices, which can solve the problems of no more installation, huge design, and inability to maintain a 3-meter height and width of a 12-inch semiconductor wafer, etc. Achieve the effect of increasing space and improving production efficiency

Inactive Publication Date: 2004-05-05
TAIWAN SEMICON MFG CO LTD
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  • Summary
  • Abstract
  • Description
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Problems solved by technology

[0009] To sum up, although the conveyor belt system (Conveyor System) currently used in 12-inch fabs has been able to improve the circulation and production of wafer cassettes in the fab to some extent, but because of the system itself The design is too bulky and takes up space (in the prior art, a hoist is installed on both sides of the conveyor belt, so i

Method used

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  • Automatic material transfer system and method
  • Automatic material transfer system and method
  • Automatic material transfer system and method

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[0026] Such as image 3 Shown is a top view of the automated wafer cassette transfer system of the present invention, in which the wafer cassette (ie, material) is transported from the inner and outer loops to each workstation 50 for related manufacturing process operations, and the inner loop is a conveyor belt 306. The outer loop is an overhead transmission system 304. Figure 4 Is along image 3 From the front view of line IV-IV, the overhead transport system (OHT) 304 includes a certain number of transport carts 301 for transporting, receiving and placing FOUP wafer cassettes 303. The extension manipulator 308 can be extended to a predetermined position (e.g. Figure 4 The right half of the FOUP is used to receive the FOUP wafer cassette 303 from the transport cart 301. The extension robot 308 has a fixed clamp 307 for clamping and fixing the FOUP wafer cassette 303. The barcode reader 305 is used to read the barcode on the FOUP wafer cassette 303, so as to know the batch number...

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Abstract

An automatic material conveying system for wafer factory is composed of an over-head transportation (OHT) subsystem for receiving, transporting and holding material, at least one workstation for transmitting material to a pointed position, a conveying belt, and at least one lifting unit for transferring the material from predefined position to said conveying belt. The space possessed by the FOOP wafer boxes on the conveying belt can be 3m (height) X3m (width), and only a telescopic arm and a hoist are needed. Its advantages are high productivity and low cost.

Description

technical field [0001] The invention relates to an automatic material transmission system and its method, in particular to an automatic material transmission system and its method using a lifting device. Background technique [0002] Automated Material Handling System (AMHS) is widely used in all walks of life for conveying materials. The materials are placed on the conveyor belt (conveyor) controlled by the automation equipment of the material flow, and the material is transported to each workstation (work station) via the conveyor belt. Take the semiconductor wafer factory (wafer fab) as an example, the wafer box containing the wafer must be transported by the conveyor belt to the machine of each manufacturing process to complete the process. After the process is completed, the wafer box It is sent back on the conveyor belt and transferred to another manufacturing process machine to complete another process. [0003] In semiconductor wafer fabrication procedures, robotic...

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Application Information

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IPC IPC(8): B65G47/04B65G49/07
Inventor 张振彰黄建荣
Owner TAIWAN SEMICON MFG CO LTD
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