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Oxygen environment scan electronic microscopic method and system

A technology of scanning electron microscopy and oxygen environment, which is applied in the field of electronics and can solve problems such as high price and complex structure

Inactive Publication Date: 2005-03-02
BEIJING UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, their construction is complex and expensive compared to ordinary SEMs

Method used

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  • Oxygen environment scan electronic microscopic method and system
  • Oxygen environment scan electronic microscopic method and system
  • Oxygen environment scan electronic microscopic method and system

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0060] Example 1: Al 2 o 3 The phenomenon of sample charging and its compensation in oxygen environment

[0061] 1. Sample observation conditions:

[0062] Al 2 o 3 For insulating ceramic materials. Therefore, if the sample is directly observed in the high vacuum mode of the SEM without surface conduction treatment, there will be obvious charging phenomenon. observed under ambient vacuum conditions injected with water vapor and oxygen, respectively, Al 2 o 3 The charging phenomenon of the sample is compensated. Compared under the same imaging conditions, different pressures, and different atmospheres, Al 2 o 3 The state of charge and charge elimination on the surface of the sample.

[0063] 2. Sink current, I a Measurement:

[0064] Measuring Al 2 o 3 The absorption current of the sample under different pressures and different ambient atmospheres (water vapor and oxygen), I a value, to compare the compensation effect of water vapor and oxygen environment on the ...

Embodiment 2

[0072] 1. Figure 7 (a), (b) and (c) are Al(OH) respectively 3 Samples in 1 x 10 -3 The secondary electron image obtained under the high vacuum of Pa, 200Pa water vapor and 200Pa oxygen ambient conditions. Figure 7 The three images are all of the same region in the sample. Acceleration voltage: 30kV; magnification: 1000×. The image shows that, directly imaged in an oxygen-free environment under high vacuum, Al(OH) 3 The surface has a serious charging phenomenon, and the image is seriously deformed and distorted, see Figure 7 (a). Imaging in 200Pa water vapor environment and oxygen environment, both eliminated the charging phenomenon and obtained clear images. But the oxygen environment ( Figure 7 (c)) than the water vapor environment ( Figure 7 (b)) Better image quality can be obtained. Figure 8 For the measured Al(OH) in water vapor and oxygen environment at different pressures 3 Sample I a value. Correspondingly, the absorbed current I measured under high va...

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Abstract

The invention relates to a direct observing and analyzing method and system to non conducting material in oxygen atmosphere created by injecting oxygen in minute quantities into scanning electron microscope. It has the property that before, scanning sample, active oxygen in minute quantities is injected into sample chamber to decrease or eliminate charged phenomenon of non conducting sample. Vacuum model is chosen before injecting oxygen, whose pressure is decreased through pressure reducing valve, degree of vacuum of sample chamber is monitored by vacuometer and vacuum gauge, needle valve is used to decrease flux of oxygen right along. Oxygen injected has little influence to the degree of vacuum of scanning electron microscope system, realizing oxygen atmosphere observation condition under different vacuum model. Oxygen microinjection system is install on sidewall of sample chamber to coordinate with oxygen atmosphere scanning electron microscope method, consisted of air feed loop, vacuum checkout systems and absorption current checkout systems. The invention has reached the goal of effectively eliminating sample of non conducting like oxide and hydroxide which will generate charged effect when does electric electron microanalysis.

Description

technical field [0001] The invention relates to a method and system for directly observing and analyzing non-conductive materials such as oxides and organisms in an oxygen environment by injecting a trace amount of oxygen into a scanning electron microscope, which belongs to the field of electronics. Background technique [0002] Scanning electron microscope (SEM) is an important equipment for observing and analyzing the microscopic morphology, composition and structure of materials. When a non-conductive sample is directly observed by an ordinary scanning electron microscope, it will be affected by the charging effect on the surface of the sample. That is: under the irradiation of high-energy incident electron beams, since the non-conductive sample cannot be well grounded, the excess incident electrons will be bound in the sample, resulting in the accumulation of charge on the surface of the sample, making it difficult to image the sample, or seriously damaging the image, c...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q30/08
Inventor 吉元钟涛兴郭汉生徐学东张虹权雪玲
Owner BEIJING UNIV OF TECH
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