Preparation method of silicon-based micro mechanical photomodulator chip

Abstract

A preparation method of silicon-based micro mechanical photomodulator chip comprises: silicon piece preparation and phosphor diffusion; preparing sacrificial layer silicon dioxide film; preparing silicon nitride film; steaming aluminium film; negative photo-etching and corroding aluminium film; etching silicon dioxide film by reacting ion; removing aluminium film; corroding sacrificial layer silicon dioxide film; positive photo-etching; preparing compound metal film; finishing electrode preparation; negative photo-etching; corroding sacrificial layer silicon dioxide film to get suspending section; reacting ion striping. The inventive silicon-based micro mechanical photomodulator chip is a key element from the optical fiber to the communication system.

Description

[0001] The invention relates to a method for preparing a silicon-based micromechanical optical modulator chip, which belongs to the technical field of micromechanical device manufacturing. Background technique [0002] With the continuous development of information technology, especially the advancement of all-optical network technology, fiber-to-the-home (FTTH) will be gradually realized. Optical modulator is one of the key devices in the field of optical communication. After years of development, various types of optical modulation devices have appeared in optical communication systems. The modulation rate of these devices is very high, typically 10 per second 9 Bits, and expensive, are not suitable for individual users such as homes and offices. The amount of information these users need to upload is generally not large, and what they need is an optical modulator with low price and moderate speed (such as in the order of megabits per second). ...

AI Technical Summary

Problems solved by technology

The Institute of Microtechnology of Neuchatel University in Sweden reported a micromechanical optical modulator with polysilicon as a suspended film in 1995, but the operating voltage of the modulator requires 90 volts, which is difficult to apply

The Department of Applied Physics of the University of Sydney in Australia has also reported a silicon-based micromechanical optical modulator. Although the performance is good, it requires multiple ion implantation techniques, the preparation process is complicated, and the production cost is also high.

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