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Method of producing piezoelectric ceramic device

A manufacturing method and technology of piezoelectric ceramics, applied in the manufacture/assembly of piezoelectric/electrostrictive devices, printed circuit manufacturing, piezoelectric/electrostrictive transducers, etc., can solve the problem of lower insulation resistance and lower voltage characteristics And other issues

Inactive Publication Date: 2005-06-01
PANASONIC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, a composition with a ratio A / B greater than 1.00 has a lower insulation resistance after sintering, so the required voltage cannot be applied during polarization, and the voltage characteristics are lowered. When used in a high temperature and high humidity atmosphere, the insulation resistance is also lower than before use. The initial value of

Method used

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  • Method of producing piezoelectric ceramic device
  • Method of producing piezoelectric ceramic device
  • Method of producing piezoelectric ceramic device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0022] FIG. 1 shows a manufacturing process of a piezoelectric ceramic composition used in a piezoelectric ceramic device according to Embodiment 1 of the present invention. The basic formula for weighing and matching is Pb(Zn 1 / 3 Nb 2 / 3 ) a Zr x Ti y o 3 Piezoelectric ceramic composition materials lead oxide (PbO), titanium oxide (TiO 2 ), zirconia (ZrO 2 ), zinc oxide (ZnO), niobium oxide (Nb 2 o 5 ) powder, so that the molar ratio of the respective metal elements becomes the composition of Fig. 2. These powders are put into a ball mill simultaneously with water and partially stabilized zirconia balls as a medium, and the ball mill is rotated for 20 hours for wet mixing (step 101). at this time. The weight ratio of material and water is 1:1, and the particle size of the medium zirconia is less than or equal to 5mm.

[0023] Next, the slurry obtained by wet-mixing the above-mentioned powders was transferred to a container having a flat bottom such as a stainless ta...

Embodiment approach 2

[0052] FIG. 6 shows a manufacturing process of the piezoelectric ceramic composition used in the piezoelectric ceramic device according to Embodiment 2 of the present invention. 7 is an exploded perspective view of a laminated piezoelectric actuator of the piezoelectric ceramic device in Embodiment 2, and FIG. 8 is a perspective view of the actuator.

[0053] In Embodiment 2, as an element having a laminated structure in which the amount of expensive palladium (Pd) used can be reduced, inexpensive internal electrodes containing 95% or more of Ag and a piezoelectric ceramic composition are simultaneously sintered, laminated layers are laminated. Electric actuators have been researched, and a method of manufacturing a piezoelectric ceramic composition that has stable insulation resistance even when used under high temperature and high humidity has been studied.

[0054] First, weigh and mix lead oxide (PbO), titanium oxide (TiO 2 ), zirconia (ZrO 2 ), zinc oxide (ZnO), niobium...

Embodiment approach 3

[0077] The manufacturing process of the piezoelectric ceramic composition used in the piezoelectric ceramic device in Embodiment 3 is the same as that in Embodiment 1 shown in FIG. 1 .

[0078] First, weigh and mix lead oxide (PbO), titanium oxide (TiO 2 ), zirconia (ZrO 2 ), zinc oxide (ZnO), niobium oxide (Nb 2 o 5 ), manganese dioxide (MnO 2 ) powder, so that the molar ratio of each metal element becomes the composition shown in Figure 12. Then, according to the process of Embodiment 3, except that the material contains MnO 2 Other than that, it is the same as Embodiment 1, so the following steps are omitted.

[0079] Next, evaluation results of samples of piezoelectric ceramic elements obtained according to the manufacturing process of Embodiment 3 are shown. Figures 12 to 15 measure the insulation resistance of the sample before polarization in step 110, and the insulation resistance after the humidity resistance storage test placed at high temperature (120°C), high...

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Abstract

Prepare a Pb(Zn1 / 3Nb2 / 3)O3-PbTiO3-PbZrO3 three-component piezoelectric ceramic composition whose basic composition formula is Pb(Zn1 / 3Nb2 / 3)aZrxTiyO3 (here, 0.90<a+x+y<1.00) s material. This material is calcined and pulverized to obtain a powder. A molded body of a predetermined shape containing the obtained powder is produced. A sintered body is obtained by degreasing the formed body at a temperature at which the formed body is not sintered, and then sintering the degreased formed body. The obtained sintered body is heated to perform heat treatment on the obtained sintered body. A piezoelectric ceramic device is obtained by polarizing the heat-treated sintered body and imparting piezoelectricity to the heat-treated sintered body. The piezoelectric ceramic composition can be simultaneously sintered at a low temperature with an electrode mainly composed of Ag, and the insulation resistance does not decrease after sintering, and the piezoelectric properties do not deteriorate. Therefore, even if the composition is used in a high-temperature and high-humidity atmosphere, the insulation resistance does not decrease, and it has stable characteristics.

Description

technical field [0001] The present invention relates to a method of manufacturing piezoelectric ceramic devices having a laminated structure, such as piezoelectric actuators, piezoelectric transformers, piezoelectric converters, and the like. Background technique [0002] Piezoelectric ceramics are widely used in piezoelectric ceramic devices such as piezoelectric converters, piezoelectric filters, piezoelectric actuators, piezoelectric transformers, or piezoelectric buzzers. In addition, the development of multilayer piezoelectric ceramic elements is also being actively developed in response to demands for miniaturization, thinning, and high performance in recent years. [0003] The sintering temperature of the conventional piezoelectric ceramic composition is high, so the electric energy used in the sintering furnace for sintering the piezoelectric ceramic is large, and the internal electrode material used in the laminated piezoelectric ceramic element has to be expensive ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/49C04B35/493H01L41/083H01L41/107H01L41/187H01L41/22H01L41/257H01L41/273H01L41/39H01L41/43H04R17/00H05K3/20
CPCY10T29/42Y10T29/49126Y10T29/4913Y10T29/49128H10N30/40H10N30/50H10N30/8548H10N30/045H10N30/097H10N30/853
Inventor 奥田和弘后藤泰司南诚一森分博纪
Owner PANASONIC CORP
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