Piezoelectric thin-film sensor with vinylidene difluoride and production thereof

A polyvinylidene fluoride piezoelectric and thin-film sensor technology, which is applied in the manufacture/assembly of piezoelectric/electrostrictive devices, piezoelectric devices/electrostrictive devices, etc., can solve the problem that the stretching ratio cannot achieve high crystal transformation Problems such as orderly orientation, piezoelectric film sensor preparation and production are not good, and polymer piezoelectric film cannot be processed continuously, so as to achieve the effects of easy operation and control, increased capacitance, and increased piezoelectric constant

Inactive Publication Date: 2006-08-16
CHANGCHUN INST OF APPLIED CHEMISTRY - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The stretching ratio of this technology cannot achieve high crystal transformation and orderly orientation of electrical domains, thus affecting the piezoelectric properties of the film, and the technology cannot continuously process polymer piezoelectric films.
There is still no good solution for the preparation and production of piezoelectric thin film sensors

Method used

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  • Piezoelectric thin-film sensor with vinylidene difluoride and production thereof
  • Piezoelectric thin-film sensor with vinylidene difluoride and production thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0010] Example 1: The granular resin was extruded into a film at a die temperature of 240°C, stretched 4.5 times at 70°C and a field of 40MV / m, and then stretched at 1×10 -3 Aluminium and silver are plated by molds under Pa vacuum, first the aluminum electrode is 55nm, then the silver electrode is 16nm, and finally the electrode is drawn. The shape of the resulting sensor is 38.8 mm in circumference. A cylindrical shape with a height of 12.0mm, the distance between the two electrodes is 21.6mm, the thickness of the sensor is 49.5μm, the capacitance is 1080pF, and the piezoelectric constant d 33 It is 11pC / N. The performance of applying this sensor to the electronic whiteboard is stable and good.

Embodiment 2

[0011] Example 2: The granular resin is extruded into a film at a die temperature of 240°C, stretched 4.5 times at 75°C and a voltage of 50MV / m, and then stretched at 2.5×10 -3 Under Pa vacuum degree, use mold to plate aluminum and silver. First, the aluminum-plated electrode is 40nm, then the silver-plated electrode is 25nm, and finally the electrode is drawn. The shape of the resulting sensor is 38.8 mm in circumference. A cylinder with a height of 12.0mm, the distance between the two electrodes is 21.6mm, the thickness of the sensor is 45μm, the capacitance is 1120pF, and the piezoelectric constant d 33 It is 15pC / N. The performance of applying this sensor to the electronic whiteboard is stable and good.

Embodiment 3

[0012] Example 3: The granular resin is extruded into a film at a die temperature of 240°C, stretched 4.5 times at 82°C and an electric field of 58MV / m, and then at 3.8×10 -3 Under Pa vacuum degree, use mold to plate aluminum and silver, first silver-plated electrode is 30nm, then aluminum-plated electrode is 40nm, and finally lead electrode. The shape of the resulting sensor is 38.8 mm in circumference. A cylinder with a height of 12.0mm, the distance between the two electrodes is 21.6mm, the thickness of the sensor is 40μm, the capacitance is 1180pF, and the piezoelectric constant d 33 It is 18pC / N. The performance of applying this sensor to the electronic whiteboard is stable and good.

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Abstract

The sensor shapes a rectangle slice with a thickness of 30-50mum. The polyvinylidene fluoride is extruded to form film. The synchronous draw polarization is made for the film, and then vacuum coating is made for it to get the sensor with piezoelectric effect for use in electronic whiteboard. The ration of drawing is 4.5:1. the polarization temperature is 65-90DEG C. The polarization electric fields 20-80MV/m. The coating material is silver and aluminum. The thickness of electrode is 50-100nm. The coating vacuum degree is 10x10-3-5 x10-7Pa. The distance between extraction electrodes is 21.6m m.

Description

Technical field [0001] The invention belongs to a polyvinylidene fluoride piezoelectric film sensor and a preparation method thereof. Background technique [0002] The polyvinylidene fluoride piezoelectric film is a very important new material with a wide range of uses in both military and civilian use. Because it can generate electrical signals to the applied stress, it is an ideal sensor element in smart structures. With the rapid development of computer technology, electronic whiteboards have also emerged at the historic moment. There are also many manufacturers of electronic whiteboards in China. This provides a lot of application space and potential for polyvinylidene fluoride piezoelectric film sensors. Therefore, polybias Vinyl fluoride piezoelectric film sensors will receive more and more attention and applications. However, no domestic manufacturer specializes in producing polyvinylidene fluoride piezoelectric film sensors for electronic whiteboards. In 1975, Naohiro Mur...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L41/08H01L41/22B29C47/00H01L41/27
Inventor 刘雅言吴亚男郇彦杨一飞郭川
Owner CHANGCHUN INST OF APPLIED CHEMISTRY - CHINESE ACAD OF SCI
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