Excimer lamp

An excimer lamp and discharge vessel technology, which is applied to discharge lamps, gas discharge lamps, and parts of gas discharge lamps, etc., can solve the problems that the getter cannot obtain the heating effect, cannot obtain sufficient getter effect, etc. Pursuing high efficiency, simple structure, and improved efficiency

Inactive Publication Date: 2006-08-23
USHIO DENKI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, since the getter is not exposed to the discharge, the heating effect cannot be obtained, and a sufficient getter effect cannot be obtained.

Method used

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Examples

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Embodiment 1

[0089] The excimer lamp A1 having the structure shown in FIG. 1 was produced under the following conditions.

[0090] Discharge vessel (10): total length about 1500mm; inner tube (17): material: synthetic quartz glass, inner diameter: about 14mm, outer diameter: about 16mm (wall thickness 1mm); outer tube (11): material: synthetic quartz glass , outer diameter: 26mm, inner diameter: 24mm (wall thickness 1mm); inner electrode (14): material: tungsten, wire bundle diameter: 0.5mm, coil diameter: 13.5mm, axial distance: 5mm, overall length: 1300mm (260 circle); outer electrode (13): material: stainless steel, discharge gas: xenon (enclosed pressure 20kPa).

[0091] As a getter, a metal wire made of tantalum and having a diameter of 0.2 mm was wound around the inner electrode at a pitch of 100%, and fixed by winding 50 mm in the axial direction.

Embodiment 2

[0093] Made under the following conditions Figure 4 Excimer lamp A2 of the configuration shown.

[0094] Discharge vessel (10): total length about 1500mm; inner tube (17): material: synthetic quartz glass, inner diameter: about 14mm, outer diameter: about 16mm (wall thickness 1mm); outer tube (11): material: synthetic quartz glass , outer diameter: 26mm, inner diameter: 24mm (wall thickness 1mm); inner electrode (14): material: titanium, wire bundle diameter: 0.5mm, coil diameter: 13.5mm, axial distance: 5mm, overall length: 1300mm (260 circle); outer electrode (13): material: stainless steel, discharge gas: xenon (enclosed pressure 20kPa).

[0095] In Example 2, an internal electrode made of titanium acts as a getter.

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Abstract

Provided is an excimer lamp provided with a getter, aimed at improvement of getter function, capable of preventing the lowering of luminance maintaining ratio and prolonging the lamp lifetime. The excimer lamp is composed of a discharging container, of which at least one part is constituted of a dielectric member transmitting ultraviolet-ray, in which discharge gas is sealed; an inner electrode, extending in longitudinal direction in the discharging container, sealed airtightly at sealing parts at the end parts of the discharging container; and an external electrode arranged on outer face of the discharging container. An inner tube, made of dielectric, is arranged in the discharging container, the inside electrode is inserted into the inner tube, and a getter is arranged inside the inner tube.

Description

technical field [0001] The present invention relates to an excimer lamp and an excimer lamp device in which a getter is arranged in a discharge vessel. Background technique [0002] Conventionally, as a discharge lamp, various configurations are known. A discharge vessel partially made of a dielectric is filled with a suitable discharge gas, and an excimer is generated by discharge in the discharge vessel through a dielectric barrier, and the excimer emits light from the excimer. Lamps are well known. For example, Japanese Patent Application Laid-Open No. 1-144560 describes an excimer lamp in which a hollow cylindrical discharge vessel at least partially made of quartz glass as a dielectric is filled with a discharge gas. [0003] In such an excimer lamp, if there is an impure gas such as oxygen, hydrogen, carbon monoxide, or water in the discharge vessel, the intensity of the emitted light will easily decrease with time. Getters that absorb these impure gases. If such a ...

Claims

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Application Information

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IPC IPC(8): H01J65/00H01J61/26H01J61/04
CPCH01J7/183H01J61/0675H01J61/26H01J61/526H01J65/042H01J65/046
Inventor 广濑贤一
Owner USHIO DENKI KK
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