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Chemical filter employing metal compound and manufacturing method thereof

A chemical filter and metal compound technology, applied in chemical instruments and methods, other chemical processes, metal processing, etc., can solve the problems of increased pressure loss, short filter life, metal oxide powder separation, etc., to prevent secondary Sub-polluting substances, improved removal efficiency, and reduced pressure loss

Inactive Publication Date: 2006-10-04
KOCAT
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0015] However, the filter manufactured by attaching the above-mentioned metal oxide to the support body by wet powder spraying method is effective under the conditions of small air volume and small physical impact on the filter, but it is used for semiconductor and In the manufacture of precision electronic instruments, under the conditions of large-volume air flow, vibration and physical shock introduced into the clean room, the problem of detachment of metal oxide powder occurs with the passage of time
In addition, when adhering to the support, when the amount of metal oxide exceeds a certain amount, the detachment of the metal oxide will be intensified, and the pressure loss will increase sharply, so the amount of metal oxide that can be attached to the support is extremely difficult to control. Compared with the method of directly forming metal oxide powder, the method of attaching metal oxide to the support has the disadvantage of short filter life due to the small amount of metal oxide that can adsorb harmful gases

Method used

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  • Chemical filter employing metal compound and manufacturing method thereof
  • Chemical filter employing metal compound and manufacturing method thereof
  • Chemical filter employing metal compound and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0068] Sorbent Manufacture

[0069] Use a stirrer at room temperature to mix iron compounds (FeO(OH), Fe 2 o 3 ) [manufactured by KOCAT, Korea] 180g, strontium compound (Sr(OH) 2 ) [Made in Nai Nai Shoji, Korea] 100g, calcium compound (Ca(OH) 2 ) 80g, copper compound (CuSO 4 ) [Evergreen Chemical Manufacturing, Korea] 180g, manganese compound (MnO 2 ) [Naigai Shoji, Korea] 180g and zeolite [Naigai Shoji, Korea] 180g of harmful gas active substances and methyl cellulose [Samsung Fine Chemicals, Korea] 40g, alumina sol [Naigai Shoji, Korea] 50 g and 10 g of organic and inorganic binders of graphite [manufactured by Nai Nai Shoji, Korea] were mixed with 40 g of ultrapure distilled water.

[0070] Then, the above-mentioned mixture was dried at a temperature of 100° C. for about 1 hour and 30 minutes in a drying oven [manufactured by Dazhou Science and Technology Co., Ltd., Korea], and then naturally aged for about 4 hours.

[0071] Next, after the above-mentioned natural agi...

Embodiment 2

[0075] In addition to using iron compounds (FeO(OH), Fe 2 o 3 ) [manufactured by KOCAT, Korea], strontium compound (Sr(OH) 2 ) [manufactured by Nai Nai Shoji, Korea], methyl cellulose [manufactured by Samsung Fine Chemicals, Korea] in a weight ratio of 45:45:1 to replace harmful gas active substances and organic and inorganic binders, The same operation as in Example 1 was carried out.

Embodiment 3

[0077] In addition to using copper compounds (CuSO 4 )[manufactured by Evergreen Chemical, Korea], iron compounds (FeO(OH), Fe 2 o 3 ) [manufactured by KOCAT, Korea], methyl cellulose [manufactured by Samsung Fine Chemicals, Korea] in a weight ratio of 70:20:10 to replace harmful gas active substances and organic and inorganic binders, and Example 1 was operated in the same manner.

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Abstract

The present invention provides a chemical filter using a metal compound to increase efficiency of removing poisonous gas and life of the chemical filter without leaking out the gas adsorbed by strong chemical bonding force of the metal compound and the poisonous gas by manufacturing an adsorbent for the chemical filter using metal oxide, metal hydroxide, metallic salt, or a mixture of those and to provide a method for manufacturing the chemical filter. The adsorbent of this chemical filter includes 10-99 wt.% of metal oxides, metal hydroxide, a metal salt or a mixture of those and 1-90 wt.% of an organic or inorganic bonding agent or a mixture of those.

Description

technical field [0001] The present invention relates to a chemical filter used to filter and remove chemical substances in the air, and more specifically, to a chemical filter used to filter and remove gaseous substances flowing into clean rooms of semiconductor, precision electronic parts, pharmaceutical and food manufacturing plants, as well as flow into Adsorbents for metal compounds containing harmful gases in the air of air conditioners and room air cleaners in the general industrial field, chemical filters using the adsorbents, and methods for producing the same. Background technique [0002] Semiconductor manufacturing processes, precision products or electronic product manufacturing processes, etc. are generally carried out in a clean room that excludes pollutants. Therefore, the degree of pollution in the clean room is an important factor directly related to the yield of manufactured products. [0003] Moreover, due to the high integration of recent semiconductor de...

Claims

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Application Information

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IPC IPC(8): B01J20/06
CPCB26B3/00B26B9/00
Inventor 吴玄明李贤基李到禧李镇九金斗晟李庆振韩永德张三德
Owner KOCAT
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