Chemical filter employing metal compound and manufacturing method thereof

A chemical filter and metal compound technology, applied in chemical instruments and methods, other chemical processes, metal processing, etc., can solve the problems of increased pressure loss, short filter life, metal oxide powder separation, etc., to prevent secondary Sub-polluting substances, improved removal efficiency, and reduced pressure loss

Inactive Publication Date: 2006-10-04
KOCAT
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0015] However, the filter manufactured by attaching the above-mentioned metal oxide to the support body by wet powder spraying method is effective under the conditions of small air volume and small physical impact on the filter, but it is used for semiconductor and In the manufacture of precision electronic instruments, under the conditions of large-volume air flow, vibration and physical shock introduced into the clean room, the problem of detachment of metal oxide powder occurs with the passage of time
In addi

Method used

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  • Chemical filter employing metal compound and manufacturing method thereof
  • Chemical filter employing metal compound and manufacturing method thereof
  • Chemical filter employing metal compound and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0067] Example 1

[0068] Manufacture of adsorbent

[0069] Use a stirrer at room temperature to remove iron compounds (FeO(OH), Fe 2 O 3 ) [Manufactured by KOCAT, South Korea] 180g, strontium compound (Sr(OH) 2 ) [Manufactured by Domestic and Foreign Commercial Affairs, South Korea] 100g, calcium compound (Ca(OH) 2 ) 80g, copper compound (CuSO 4 ) [Evergreen Chemical Manufacturing, South Korea] 180g, manganese compound (MnO 2 ) [Made by Domestic and Overseas Trading, Korea] 180g and zeolite [Made by Domestic and Overseas Trading, Korea] 180g of harmful gas active substances and containing methyl cellulose [Made by Samsung Fine Chemicals, Korea] 40g, alumina sol [Made by Domestic and Overseas Trading, Korea] 50g and 10g of graphite [manufactured by Nikai Shoji, Korea] are mixed with 40g ultrapure distilled water.

[0070] Then, the mixture was dried at a temperature of 100°C for about 1 hour and 30 minutes in a drying furnace [manufactured by Dazhou Science, Korea], and then natur...

Example Embodiment

[0074] Example 2

[0075] In addition to using iron compounds (FeO(OH), Fe 2 O 3 ) [Manufactured by KOCAT, South Korea], strontium compound (Sr(OH) 2 ) [Industrial and foreign commercial manufacturing, South Korea], methyl cellulose [Samsung Fine Chemicals Manufacturing, South Korea] a mixture of 45:45:1 by weight ratio to replace harmful gas active substances and organic and inorganic adhesives, The operation was the same as in Example 1.

Example Embodiment

[0076] Example 3

[0077] In addition to the use of copper compounds (CuSO 4 ) [Evergreen Chemical Manufacturing, South Korea], iron compounds (FeO(OH), Fe 2 O 3 ) [Manufactured by KOCAT, South Korea], methyl cellulose [manufactured by Samsung Fine Chemicals, South Korea] is a mixture mixed in a weight ratio of 70:20:10 to replace harmful gas active substances and organic and inorganic adhesives, and Example 1 was operated in the same manner.

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PUM

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Abstract

The present invention provides a chemical filter using a metal compound to increase efficiency of removing poisonous gas and life of the chemical filter without leaking out the gas adsorbed by strong chemical bonding force of the metal compound and the poisonous gas by manufacturing an adsorbent for the chemical filter using metal oxide, metal hydroxide, metallic salt, or a mixture of those and to provide a method for manufacturing the chemical filter. The adsorbent of this chemical filter includes 10-99 wt.% of metal oxides, metal hydroxide, a metal salt or a mixture of those and 1-90 wt.% of an organic or inorganic bonding agent or a mixture of those.

Description

technical field [0001] The present invention relates to a chemical filter used to filter and remove chemical substances in the air, and more specifically, to a chemical filter used to filter and remove gaseous substances flowing into clean rooms of semiconductor, precision electronic parts, pharmaceutical and food manufacturing plants, as well as flow into Adsorbents for metal compounds containing harmful gases in the air of air conditioners and room air cleaners in the general industrial field, chemical filters using the adsorbents, and methods for producing the same. Background technique [0002] Semiconductor manufacturing processes, precision products or electronic product manufacturing processes, etc. are generally carried out in a clean room that excludes pollutants. Therefore, the degree of pollution in the clean room is an important factor directly related to the yield of manufactured products. [0003] Moreover, due to the high integration of recent semiconductor de...

Claims

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Application Information

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IPC IPC(8): B01J20/06
CPCB26B3/00B26B9/00
Inventor 吴玄明李贤基李到禧李镇九金斗晟李庆振韩永德张三德
Owner KOCAT
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