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Photoetching machine synchronous sequential control serial data communication method and system and use

A technology of serial data and synchronous timing, which is applied in the field of lithography to achieve the effect of realizing precise synchronous control, realizing reliability, and improving real-time and reliability

Active Publication Date: 2006-10-25
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] (1) Scanning must be done within the same time period for all involved submodules

Method used

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  • Photoetching machine synchronous sequential control serial data communication method and system and use
  • Photoetching machine synchronous sequential control serial data communication method and system and use
  • Photoetching machine synchronous sequential control serial data communication method and system and use

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Embodiment Construction

[0029] Below in conjunction with accompanying drawing and specific embodiment, the present invention is explained in more detail:

[0030] The invention is a high-speed serial data communication mechanism for synchronous timing control of a step-scan projection lithography machine, and realizes direct synchronous signal control of multiple control units for exposure scanning of a step-scan projection lithography machine. This process takes the synchronous bus data transmission cycle as a strict time control benchmark, and strictly controls the trigger time points of each synchronous signal, so as to realize the real-time and synchronization of data and signals between various control units.

[0031] The step-scan projection lithography machine is a very complex control system, which has multiple control units and synchronization requirements for various data communications. In order to achieve strict synchronization control between each control unit, a step-scan projection is d...

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Abstract

Synchronous bus controller issues synchronizing information real time to work head motion control card, mask platform motion control card, and alignment motion control card through synchro data bus, said motion control card receiving synchronous bus controller interval synchronous signal and state synchronous signal and respectively synthesizing into optical fiber triggering signal and status signal, then sending to underlayer I / O control panel, alignment control system and leveling focusing control system. The present invention realizes real-time data communication and synchronization control among plurality of control units in step scan projection photoetching machine.

Description

Technical field [0001] The invention belongs to the lithography technology in the integrated circuit manufacturing process, in particular to a high-speed serial data communication method and system for synchronous timing control of a step-scan projection lithography machine. Background technique [0002] Photolithography is the most critical process in the process of integrated circuit processing, so the lithography machine is the most critical equipment in the process of integrated circuit processing. Foreign countries have proposed the concept of next-generation lithography many years ago, and have conducted a lot of research on technologies such as extreme ultraviolet lithography, electron beam projection lithography, and ion beam projection lithography. For many reasons, these technologies are still difficult to be fully practical. Currently, deep ultraviolet projection lithography equipment still dominates the market. [0003] At present, most of the step-and-repeat l...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20G06F13/42
Inventor 池峰陈勇辉林科吴小健
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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