Preprocessed optical coating materials and preprocessed method thereof

An optical coating and pretreatment technology, applied in metal material coating process, sputtering coating, ion implantation coating, etc., can solve problems such as time-consuming, limited loading of particles or small pieces of material, poor film repeatability, etc.

Active Publication Date: 2007-04-25
有研资源环境技术研究院(北京)有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there are generally several problems in operation: 1) When using particles or small pieces of coating materials, first fill the entire crucible, start coating after sufficient pretreatment, and then intermittently add materials several times according to the usage situation, and repeat coating; 2) Filling with particles or small pieces of material limited quantity
In this way, it takes a lot of time to repeat the vacuuming and pretreatment process after each feeding and before the coating; in addition, especially for the large-scale production of precision film systems, since the coating process needs to be readjusted for each intermittent operation, the repetition of the film bad sex

Method used

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  • Preprocessed optical coating materials and preprocessed method thereof

Examples

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preparation example Construction

[0050] The preparation process step of pretreatment optical coating material of the present invention is as follows:

[0051] 1) Choose suitable raw material powder, the general purity is 99.9% ~ 99.99%; particle size D 50 1-50 μm, preferably 1-10 μm powder is the raw material.

[0052] 2) Under the conditions of a temperature of 700-1400° C. and a pressure of 10-40 MPa, the blank is prepared by vacuum hot pressing.

[0053] 3) The relative density of the green body is controlled at 80% to 95%.

[0054] 4) The biscuit prepared above is sintered at a high temperature in a high-temperature sintering furnace, and sintered at a constant temperature at a sintering temperature of 900-1800° C. for 2-4 hours.

[0055] 5) The above-mentioned high-temperature sintered green body is processed and shaped strictly according to the size of the crucible by using a surface grinder and an outer cylindrical grinder, and the dimensional accuracy is controlled below 0.1mm; the structural size o...

Embodiment 1

[0060] Embodiment 1, titanium dioxide (TiO 2 ) Preparation of pretreatment optical coating material

[0061] 1) The selected purity is 99.99%, D 50 3-5μm TiO 2 Powder as raw material;

[0062] 2) Under the conditions of a temperature of 1000°C and a pressure of 20Mpa, the blank is prepared by vacuum hot pressing;

[0063] 3) The relative density of the green body is controlled above 90%;

[0064] 4) Sintering the bisque prepared above in a high-temperature sintering furnace at a high temperature, and sintering at a constant temperature of 1600° C. for 4 hours;

[0065] 5) Process and shape the above-mentioned high-temperature sintered green body using a surface grinder and a cylindrical grinder in strict accordance with the size of the crucible, and the dimensional accuracy is controlled below 0.1mm;

[0066] 6) Wash and dry the processed materials;

[0067] 7) Degassing the green body above in a reducing atmosphere furnace. The reducing atmosphere is H 2 and N 2 mixt...

Embodiment 2

[0070] Embodiment 2, tantalum pentoxide (Ta 2 o 5 ) Pretreatment of optical coating materials

[0071] 1) The selected purity is 99.99%, D 50 5-10μm Ta 2 o 5 Powder as raw material;

[0072] 2) Under the conditions of a temperature of 1400°C and a pressure of 23Mpa, the blank is prepared by vacuum hot pressing;

[0073] 3) The relative density of the green body is controlled above 90%;

[0074] 4) Sintering the bisque prepared above in a high-temperature sintering furnace at a high temperature, and sintering at a constant temperature of 1600° C. for 4 hours;

[0075] 5) Process and shape the above-mentioned high-temperature sintered green body using a surface grinder and a cylindrical grinder in strict accordance with the size of the crucible, and the dimensional accuracy is controlled below 0.1mm;

[0076] 6) Wash and dry the processed materials;

[0077] 7) Degassing the green body above in a reducing atmosphere furnace. The reducing atmosphere is H 2 and N 2 mixt...

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Abstract

The invention discloses a pretreated optical coating material and its pretreated methods. The methods includes: (1) selecting the optical coating powder, (2) preparing simple blank at a temperature of 700-1400DEG C, pressure of 10-40Mpa, (3) sintering in a high-temperature sintering furnace at 900-1800DEG C for 2-4h for the preparation bodyware; (4)processing and forming the bodyware strictly in accordance with coater crucible size, (5) degassing in the reduction furnace, at a temperature of 1000-1700DEG C, for 2-6hours to obtain the pretreated optical coating materials. The TiO2 pretreated optical coating materials has a relative density of 99%, oxygen content of 39.8%, oxygen loss rate of 6%, by fitting its stoichiometric formula, its molecular formula is TiO1.979. Pretreated optical coating material has the following characteristics: 1) high pyknosis with relative density over 90%, close to the theoretical density; 2) losing some lattice oxygen according to high refractive index optical oxide coating materials.

Description

technical field [0001] The invention relates to a pretreatment optical coating material and a pretreatment method thereof. Background technique [0002] When the electron gun evaporation process is used to coat the film, the electron gun is used to pre-melt the coating material for a certain period of time under a certain power before the coating starts, and the material is completely or partially melted after being bombarded by the electron beam. As a result of the pre-melting treatment, on the one hand, the material is densified and the entrapped gas is released to avoid the material outgassing and splashing during coating; on the other hand, for oxide materials with high refractive index, a small amount of lattice oxygen is also lost. . For most oxide optical coating materials, the pre-deoxygenation of the material makes the coating process easier to control. [0003] For ordinary electron gun evaporation coating, the material must be fully pre-melted before evaporation...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/08C23C14/02
Inventor 王星明储茂有段华英黄松涛张碧田邓世斌张明贤龚述荣潘德明
Owner 有研资源环境技术研究院(北京)有限公司
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