Preprocessed optical coating materials and preprocessed method thereof

An optical coating and pretreatment technology, applied in metal material coating process, sputtering coating, ion implantation coating, etc., can solve problems such as time-consuming, limited loading of particles or small pieces of material, poor film repeatability, etc.
CN1952204AActive Publication Date: 2007-04-25有研资源环境技术研究院(北京)有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
有研资源环境技术研究院(北京)有限公司
Publication Date
2007-04-25

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Abstract

The invention discloses a pretreated optical coating material and its pretreated methods. The methods includes: (1) selecting the optical coating powder, (2) preparing simple blank at a temperature of 700-1400DEG C, pressure of 10-40Mpa, (3) sintering in a high-temperature sintering furnace at 900-1800DEG C for 2-4h for the preparation bodyware; (4)processing and forming the bodyware strictly in accordance with coater crucible size, (5) degassing in the reduction furnace, at a temperature of 1000-1700DEG C, for 2-6hours to obtain the pretreated optical coating materials. The TiO2 pretreated optical coating materials has a relative density of 99%, oxygen content of 39.8%, oxygen loss rate of 6%, by fitting its stoichiometric formula, its molecular formula is TiO1.979. Pretreated optical coating material has the following characteristics: 1) high pyknosis with relative density over 90%, close to the theoretical density; 2) losing some lattice oxygen according to high refractive index optical oxide coating materials.
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Description

technical field

[0001] The invention relates to a pretreatment optical coating material and a pretreatment method thereof. Background technique

[0002] When the electron gun evaporation process is used to coat the film, the electron gun is used to pre-melt the coating material for a certain period of time under a certain power before the coating starts, and the material is completely or partially melted after being bombarded by the electron beam. As a result of the pre-melting treatment, on the one hand, the material is densified and the entrapped gas is released to avoid the material outgassing and splashing during coating; on the other hand, for oxide materials with high refractive index, a small amount of lattice oxygen is also lost. . For most oxide optical coating materials, the pre-deoxygenation of the material makes the coating process easier to control.

[0003] For ordinary electron gun evaporation coating, the material must be fully pre-melted before evaporation...

Claims

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