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Sputtering target, optical information recording medium and method for producing same

A recording medium and a manufacturing method technology, applied in the field of sputtering targets, can solve the problems of poor optical properties and amorphous properties, and achieve the effects of improving transmittance, improving repetitive rewriting properties, and excellent mechanical properties

Inactive Publication Date: 2011-05-04
JX NIPPON MINING & METALS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] However, Patent Documents 1 to 3 include problems in the field of poor optical characteristics and amorphous properties.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1-4

[0046] Prepare SiO with a thickness of 5 μm or less equivalent to 4N 2 Powder, Y 2 o 3 Powder and Al 2 o 3 The powder was blended according to the composition shown in Table 1, mixed by a wet method, dried, and then calcined at 1100°C. Then, the calcined powder is finely pulverized by wet method to an average particle diameter of about 1 μm, and then a binder is added and granulated by a spray dryer. The granulated powder is then cold-pressed, sintered under normal pressure at 1200-1600°C in an oxygen environment (flowing), and finally the sintered material is machined into the shape of the target.

[0047] The sintering temperatures of Examples 1 to 4 were 1400°C, 1550°C, 1250°C, and 1400°C, respectively. In addition, as long as the sintering temperature is within the above-mentioned temperature range, sintering can be performed almost equally.

[0048] Table 1

[0049] example

composition

Y 2 o 3 :Al 2 o 3 : SiO 2

T / P password ...

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Abstract

A sputtering target characterized by being composed of a material mainly containing Y2O3, Al2O3 and SiO2, an optical information recording medium characterized in that at least a part of the structure thereof is formed as a thin film using the sputtering target and arranged adjacent to a recording layer or a reflective layer, and its producing method. Disclosed is a thin film for optical information recording medium (especially one used as a protective film) which has stable amorphous properties, excellent adhesion to the recording layer and mechanical characteristics, and high transmittance. Since the thin film is composed of a non-sulfide material, deterioration of the adjacent reflective layer and recording layer hardly occurs. A production method thereof and a sputtering target applicable thereto are also disclosed. Consequently, characteristics of the optical information recording medium are enhanced and productivity can be improved significantly.

Description

technical field [0001] The present invention relates to a thin film for optical information recording medium (especially used as a protective film) and its manufacturing method and a sputtering target suitable for these. The amorphous state of the sputtering film for optical information recording medium is stable and compatible with recording The layer has excellent adhesion and mechanical properties, and has high transmittance. In addition, since it is composed of non-sulfides, it is difficult to deteriorate the adjacent reflective layer and recording layer. Background technique [0002] For a long time, ZnS-SiO, which is generally used mainly as a protective layer of phase-change optical information recording media 2 , has excellent optical properties, thermal properties, and adhesion to the recording layer and other properties, and is widely used. [0003] However, today's rewritable DVD represented by Blue-Ray is further strongly required to increase the number of times...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/34C04B35/50G11B7/24G11B7/26C23C14/08G11B7/254G11B7/257
CPCC03C17/245C03C2217/213C03C2217/214C03C2217/228C03C2217/23C03C2218/154C04B35/18C04B2235/3217C04B2235/3225C04B2235/3418C04B2235/5436C04B2235/656C04B2235/6585C04B2235/77C04B2235/9653C23C14/08C23C14/3414G11B7/24G11B7/243G11B7/257G11B7/259G11B7/266
Inventor 高见英生矢作政隆
Owner JX NIPPON MINING & METALS CORP