Omnibearing detection method for large-diameter aspherical mirror

An aspheric mirror and detection method technology, which is applied in the direction of measuring devices, optical instrument testing, and testing optical performance, can solve the problems of troublesome post-processing, high precision of auxiliary mirrors, and difficult production, and achieve convenient purchase, high precision, and low price Effect

Inactive Publication Date: 2007-07-11
SICHUAN UNIV
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Problems solved by technology

[0007] In order to overcome the deficiencies of the above-mentioned several measurement methods, a detection method of large-aperture aspheric mirror full-field continuous scanning is proposed. This method can effectively solve the problems existing in several existing quantitative detection methods. High, difficult to manufacture, high cost, large amount of data, troublesome post-processing, etc., this method does not need to design and manufacture complex aspheric compensators, no sub-aperture splicing, simple system structure, small amount of data and easy processing, etc.

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  • Omnibearing detection method for large-diameter aspherical mirror
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  • Omnibearing detection method for large-diameter aspherical mirror

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[0028]As shown in FIG. 1 , the system is mainly composed of an interferometer (such as a Fizeau interferometer), a spherical lens 9 , an aspheric mirror 10 to be tested, an electronically controlled translation stage 11 , a digital driver 12 and a computer system 14 . The interferometer is mainly composed of a laser light source 1 , a collimating lens 2 , a plane standard lens 3 , a beam splitting prism 4 , an imaging lens 5 and a CCD detector 6 . The standard spherical lens 9 is located between the interferometer and the measured aspheric mirror 10, and the optical axes of the three are on the same straight line. One of the implementation methods is to place the measured aspheric mirror 10 on an electronically controlled translation platform, and the computer system 14 controls it to move precisely in the direction of the optical axis through the digital driver 12, so that the measured aspheric mirror 10 is connected with the interferometer and the spherical surface. The sphe...

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Abstract

The big caliber nonspherical lens inspection controls the moving conoscope through the computer, continuously scanning the big caliber nonspherical lens along the symmetrical axis, acquiring the interference thread changing through time. The generated reference ball surface wave automatically matching with the nonspherical ball surface to be inspected, the best matching zone with low frequency distinguishable interference thread, moving from the center to the edge in the scanning process. Through acquiring the best matching point data to make overall caliber restructuring before the wave, it can acquire the overall information of the nonspherical surface. It is free from design and nonspherical surface compensator, and junction of sub caliber, providing an efficient tool to overall inspection for big caliber nonspherical lens with broad prospect.

Description

technical field [0001] The invention relates to an optical detection technology, in particular to a detection method for a rotationally symmetrical large-aperture aspheric mirror, which belongs to the field of advanced optical manufacturing and detection technology. technical background [0002] The so-called aspheric optical element refers to an optical element whose surface shape is determined by multiple high-order equations, and the radii of each point on the surface shape are not the same. Aspheric mirrors are special surfaces with many unique properties. If the quadric surface has no spherical aberration at the proper conjugate position, using the aspheric surface in the optical system can reduce the number of optical elements in the system or improve the imaging quality. With the development of optical precision processing, aspheric surfaces are more and more widely used in various optical systems, such as: high-quality cameras, video cameras, etc. In many fields su...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M11/00G01M11/02
Inventor 苏显渝赵文川张启灿向立群曹益平陈文静
Owner SICHUAN UNIV
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