Soller slit using low density materials

a low density, material technology, applied in the field of x-ray metrology, can solve the problems of poor transmission through the soller slit device, difficult control of the divergence, poor mechanical stability of very thin sheets, etc., and achieve the effect of increasing the transmission throughput efficiency and low density
US20050281382A1Inactive Publication Date: 2005-12-22BEDE
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Patent Information

Authority / Receiving Office
US · United States
Patent Type
Applications(United States)
Current Assignee / Owner
BEDE
Publication Date
2005-12-22
Estimated Expiration
Not applicable · inactive patent

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Abstract

A Soller slit device is provided for collimation of high energy radiation, such as X-ray or EUV radiation, and has a low angle of divergence (less than 0.1°) and a high transmission efficiency (60 to 80% or greater). The Soller slit is made up of multiple blades of low-density material, such as glass, mica, or the like, which are treated to reduce reflectivity. The Soller slit device of the invention advantageously provides an increased peak intensity and decreased peak width in diffraction patterns produced in high energy diffractometry applications, such as X-ray diffractometry.
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Description

FIELD OF THE INVENTION

[0001] The present invention relates to X-ray metrology. Specifically, the present invention relates to an absorption element used to control the divergence of a beam of X-rays. BACKGROUND OF THE INVENTION

[0002] In recent years, technology involving high energy radiation, such as X-ray and extreme ultraviolet (EUV) radiation has increased. However, because of the very nature of this type of radiation, it is often difficult to control its divergence. One common optical element used for controlling the divergence of an X-ray beam is called a Soller slit. Soller slits generally comprise a set of parallel, or nearly parallel, plates or blades that limit the divergence of an X-ray beam by simple blocking or absorption of divergent rays, which are not allowed to pass through an open section of the array.

[0003] Typically, Soller slits have been made of materials of high density to allow for absorption of divergent X-rays. It has been generally thought that material...

Claims

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