Laterally Implanted Electroabsorption Modulated Laser

a modulation laser and laser technology, applied in semiconductor lasers, instruments, non-linear optics, etc., can solve the problems of limited modulation efficiency, poor reliability and manufacturing complexity, and low output power, and achieve the effect of reducing the capacitance of the modulator
US20070223543A1Inactive Publication Date: 2007-09-27BOOKHAM TECH

Patent Information

Authority / Receiving Office
US · United States
Patent Type
Applications(United States)
Current Assignee / Owner
BOOKHAM TECH
Publication Date
2007-09-27
Estimated Expiration
Not applicable · inactive patent

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Abstract

A monolithically integrated electroabsorption modulated laser having a ridge waveguide structure, has lateral ion implantation. The integrated device has a laser section and a modulator section. The modulator section has ion implanted regions adjacent to the waveguide ridge. The implanted regions penetrate through the top cladding layer to reduce capacitance within the intrinsic active core of the reverse biased modulator and allow a shallow etched ridge waveguide structure to be used for the modulator. The device provides good optical coupling, efficient manufacturing, and good high power performance.
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Description

CROSS-REFERENCE TO RELATED APPLICATIONS

[0001] This is the first application filed for the present invention. MICROFICHE APPENDIX

[0002] Not Applicable. TECHNICAL FIELD

[0003] The present invention relates to the field of photonics and the construction of lasers and electroabsorption modulators, and more particularly with the construction of a monolithically integrated electroabsorption modulated laser. BACKGROUND OF THE INVENTION

[0004] Electroabsorption modulators (EAMs) provide a convenient and efficient way of modulating optical communications signals, especially those generated by laser sources. Combining a laser and an EAM into a monolithically integrated electroabsorption modulated laser (EML) can reduce manufacturing costs, assembly costs and footprint. An important consideration in monolithically integrating a laser and modulator on a single waveguide is that there must be good optical coupling between the two sections—there must be a good overlap between their optical mode...

Claims

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