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Label sheet for cleaning and conveying member having cleaning function

a technology of conveying member and label sheet, which is applied in the preparation of detergent mixture, cleaning equipment, transportation and packaging, etc., can solve the problems of reducing the availability factor of equipment, affecting the working efficiency of the conveying member, and successive contamination of the succeeding substrate, etc., and achieves the effect of enhancing the working efficiency and reliably conveying on the substra

Inactive Publication Date: 2011-09-22
NITTO DENKO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The invention provides a label sheet for cleaning that can be easily conveyed on a substrate in substrate processing equipment and remove foreign matter sticking in the equipment. The label sheet does not require sheet cutting after bonding to the substrate, which enhances working efficiency and generates no waste. The invention also provides a method of manufacturing the label sheet that ensures easy and reliable removal of foreign matter without defective punching or adhesive curing. The label sheet includes an adhesive layer and a cleaning layer that can be removably provided on a separator or a conveying member. The cleaning layer is a curing type adhesive that is polymerized and cured upon receipt of an active energy. The label sheet can be easily attached to the substrate and detached after use.

Problems solved by technology

In this case, if foreign matters stick to the substrate or the conveying system, succeeding substrates are successively contaminated.
For this reason, there is a problem in that an availability factor of the equipment is reduced and a great deal of labor is required.
Of these methods, the method of removing foreign matter by conveying a plate-shaped member allows easy conveyance of the plate-shaped member, but is relatively less effective in cleaning foreign matter.
However, there is a possibility that the adhesive substance and a portion of the equipment might be bonded too strongly to be removed.
Therefore, the substrate might not be conveyed reliably.
In particular, when a pressure reducing absorption mechanism is used for a chuck table of the equipment, this problem is prevalent.
However, in such a method, refuse from the cut away portion might be generated and might stick to the substrate or the equipment.
In some cases, however, an adhesive of the cleaning sheet might leak out of a punched surface during the sheet punching and might stick to an end of the cleaning sheet or substrate so that an appearance is deteriorated or conveyance troubles are caused.
Furthermore, in the case in which an adhesive of a polymerization and curing type is used, the adhesive on the end of the cleaning sheet causes defective curing by polymerization inhibition due to oxygen inhibition if the curing is carried out after the sheet punching.
Therefore, the contact portion of the substrate processing equipment might be contaminated by the adhesive.

Method used

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  • Label sheet for cleaning and conveying member having cleaning function
  • Label sheet for cleaning and conveying member having cleaning function
  • Label sheet for cleaning and conveying member having cleaning function

Examples

Experimental program
Comparison scheme
Effect test

first example

[0054]An adhesive solution of an ultraviolet curing type was prepared by uniformly mixing 50 parts by weight of polyethyleneglycol dimethacrylate, 50 parts by weight of urethane acrylate, 3 parts by weight of benzyldimethyl ketal and 3 parts by weight of diphenylmethane diisocyanate with 100 parts by weight of acryl based polymer (a weight average molecular weight of 700000) obtained by a monomer mixed solution containing 75 parts by weight of acrylic acid-2-ethylhexyl, 20 parts by weight of methyl acrylate and 5 parts by weight of acrylic acid.

[0055]Additionally, an ordinary adhesive solution was prepared in the same manner as described above except that the benzyldimethyl ketal was excluded from the adhesive.

[0056]The ordinary adhesive solution was coated to have a thickness of 10 μm after drying over the removed surface of a separator formed of an elongated polyester film (with a thickness of 38 μm and a width of 250 mm) having one surface treated with a silicone based remover. A...

second example

[0067]An adhesive solution of an ultraviolet curing type was prepared by uniformly mixing 50 parts by weight of polyethyleneglycol 200 dimethacrylate (produced by SHIN-NAKAMURA CHEMICAL CO., LTD: trade name of Nk Ester 4G), 50 parts by weight of urethane acrylate (produced by SHIN-NAKAMURA CHEMICAL CO., LTD: trade name of U-N-01), 3 parts by weight of polyisocyanate compound (produced by NIPPON POLYURETHANE INDUSTRY CO., LTD: trade name of Colonate L) and 3 parts by weight of benzyldimethyl ketal as a photopolymerization initiator (produced by CIBA SPECIALTY CHEMICALS K.K.: trade name of Irugacure-651) with 100 parts by weight of acryl based polymer (a weight average molecular weight of 700000) obtained by a monomer mixed solution containing 75 parts by weight of acrylic acid-2-ethylhexyl, 20 parts by weight of methyl acrylate and 5 parts by weight of acrylic acid.

[0068]Additionally, an ordinary adhesive solution was obtained in the same manner as described above except that the ben...

third example

[0079]An adhesive solution of an ultraviolet curing type was prepared by uniformly mixing 50 parts by weight of polyethyleneglycol 200 dimethacrylate (produced by SHIN-NAKAMURA CHEMICAL CO., LTD: trade name of Nk Ester 4G), 50 parts by weight of urethane acrylate (produced by SHIN-NAKAMURA CHEMICAL CO., LTD: trade name of U-N-01), 3 parts by weight of polyisocyanate compound (produced by NIPPON POLYURETHANE INDUSTRY CO., LTD: trade name of Colonate L) and 3 parts by weight of benzyldimethyl ketal as a photopolymerization initiator (produced by CIBA SPECIALTY CHEMICALS K.K.: trade name of Irugacure-651) with 100 parts by weight of acryl based polymer (a weight average molecular weight of 700000) obtained by a monomer mixed solution containing 75 parts by weight of acrylic acid-2-ethylhexyl, 20 parts by weight of methyl acrylate and 5 parts by weight of acrylic acid.

[0080]Additionally, an ordinary adhesive solution was obtained in the same manner as described above except that the ben...

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Abstract

A label sheet for cleaning is formed of a label for cleaning including a cleaning layer having a 180° peeling adhesion to a silicon wafer of 0.20 N / 10 mm or less after receiving an active energy and an adhesive layer provided on one of surfaces of said cleaning layer, and a separator on which the label is removably provided through the adhesive layer.

Description

[0001]This is a continuation of application Ser. No. 10 / 297,184 filed Dec. 3, 2002, which is a 371 Application of PCT / JP01 / 03850 filed May 8, 2001, which claims priority from Japanese Patent Application No. 2001-109405 filed Apr. 9, 2001 and Japanese Patent Application No. 2001-111791 filed Apr. 10, 2001. The entire disclosures of the prior applications are hereby incorporated by reference.TECHNICAL FIELD[0002]The present invention relates to a label sheet for cleaning equipment, and a label sheet for cleaning on a conveying member for use in a clean substrate processing apparatus, for example, manufacturing equipment or checking equipment for a semiconductor, a flat panel display or a printed board.BACKGROUND ART[0003]Various forms of substrate processing equipment utilize a conveying system to convey a substrate in physical contact with the conveying system. In this case, if foreign matters stick to the substrate or the conveying system, succeeding substrates are successively cont...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): B32B7/06B08B7/00B32B7/12A47L25/00C11D11/00H01L21/00
CPCA47L25/005B08B7/0028C11D11/0047C11D11/0058H01L21/67028Y10T156/1075Y10T428/24752Y10T428/14Y10T428/1495Y10T428/1471B08B13/00C11D2111/42C11D2111/22H01L21/304
Inventor NAMIKAWA, MAKOTOTERADA, YOSHIONUKAGA, JIROUTOYODA, EIJI
Owner NITTO DENKO CORP
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