Insulating walls and staged etching keep DRAM word line contacts aligned, preventing shorts as wiring pitch shrinks.
Low-temperature source/drain epitaxy below 500°C avoids contact opening masks and preserves selective growth in replacement gate CMOS.
A slower-etch replacement spacer widens the gate cavity for cleaner filling, reducing voids, seams, and gate resistance.
Offset active contacts and vertically stacked regions raise transistor density while preserving operating characteristics and easing 3D contact integration.
A vertical channel layout places semiconductor portions at bit line height to cut contact resistance and improve channel control and reliability.
Forming PMOS source/drain features before NMOS expands the FinFET processing window, improving isolation uniformity and alignment.
A shaped SOI FET source/drain boosts saturation current while limiting gate overlap capacitance, with optional stress-induced mobility gain.
A low-dielectric region beneath source and drain metal contacts cuts gate coupling, lowering off-capacitance and RF switch loss.
Monolithic Schottky diodes on a GaN power transistor clamp gate overvoltages, cut parasitic inductance, and preserve fast switching.
An AlOx sacrificial layer protects TAOS during hydrofluoric acid cleaning, enabling LTPS and oxide TFTs on one substrate.
Extending gate spacers into undercut regions improves electrical properties, reduces formation defects, and supports higher integration density.
Liquid gating and multiplexed GFET layout enable rapid, sensitive biomarker detection without complex optical equipment.
Self-aligned isolation trenches between aligned FinFET fins cut isolation footprint, reduce dummy gates, and improve lithography overlay.
A dummy-gate-first flow improves fin epitaxy and forms a buried power rail, simplifying fabrication while freeing routing space.
Gate modulation around the charge neutrality point with CMOS demodulation suppresses 1/f noise and improves GFET digital read-out.
Angled semiconductive pillar contacts increase spacing between storage node and digit line regions to cut shorting risk at high density.
A strip-shaped via through stacked dielectric layers enlarges FinFET contact area, reducing contact resistance at smaller feature sizes.
An annular dielectric in a 3D memory pillar isolates the channel to extend charge retention, cut leakage, and reduce refresh power.
Direct gate-to-wiring contact removes plug and via interfaces, cutting contact resistance and reducing short risk in semiconductor structures.
Shaped insulating patterns in a lift-off process improve contact electrode area and prevent disconnection in light-emitting display fabrication.
Oxide semiconductor transistors cut off-state current in global shutter CMOS pixels, suppressing charge leakage and image distortion.
A depleted photoelectric conversion layer with injection-blocking wells speeds signal charge transport while limiting non-signal charge injection.
Segmented SiGe isolation enables selective cavity etching for stable inner spacer formation in 3D-stacked nanosheet transistors.
A sacrificial cut mask enables smaller source/drain contact openings, reducing bridging risk and contact resistance in scaled semiconductors.
Segmented etching creates stepped through-hole openings across thick mixed insulating layers, reducing defects and improving pad-to-chip connectivity.
A weak-then-strong gate drive cuts EMI during turn-on while fully enhancing the cascode switch for accurate current sensing.
A single voltage source drives complementary gate drivers to create bipolar gate control without dual isolated supplies, cutting bulk and failure points.
An inner spacer protects the lower work-function metal during upper gate formation, enabling separate threshold voltages in 3D-stacked nanosheet transistors.
A poly-Si lower gate electrode acts as an etch barrier, protecting the lower work-function metal while simplifying 3D-stacked transistor fabrication.
A 2D material layer on a germanium-based semiconductor cuts Schottky barrier contact resistance by removing interfacial layers and pinning.
A superconducting gate switches by phase change to avoid gate oxide leakage while enabling efficient signal switching and amplification.
A recessed source/drain contact paired with a raised connection contact reduces parasitic capacitance and resistance as semiconductor pitch shrinks.
A dual-liquid-crystal pixel with switches and resistors improves voltage holding, cuts charge leaks, and widens viewing angles.
A concave floating gate and multilayer dielectric stack boost erase-gate coupling without thinner dielectrics, improving retention and programming speed.
Metallic TMD source and drain regions cut channel contact resistance while keeping transistor fabrication compatible with CMOS scaling.
An air gap inside the FinFET fin and a dielectric cap improve cell isolation, prevent leakage, and support further scaling.
Oxidation or nitridation between adjacent gate electrodes forms insulating barriers that prevent bridging shorts and improve wafer yield.
A localized high-k gate insulating layer cuts parasitic capacitance and leakage current while preserving semiconductor reliability.
Tailored mutual inductance and bridge-arm inductance equalize dynamic current in parallel switches, limiting gate oscillation and thermal stress.
A profiled work-function metal gate uses annealed layered metals to tune NMOS and PMOS work functions, improving threshold uniformity and drain current.
Selective wet etching removes platinum and nickel residues from source/drain contacts while keeping SiN spacers substantially intact.
Using two polysilicon layers in the cell contact helps form straighter sense line etch profiles and reduces necking and tapering defects.
Segmented SiGe isolation layers enable inner spacer formation in 3D-stacked nanosheet transistors while preserving etch selectivity and profile stability.
By stacking and sharing pass-gate transistors across adjacent SRAM cells, this case cuts cell area without major process changes.
A poly-Si lower gate and inner spacer protect the lower work-function metal during upper-stack etching while enabling distinct threshold voltages.
Reverse-biased boundary gates replace deep-etched diffusion breaks in 3D-stacked semiconductors, simplifying isolation and fabrication.
Back-gate interconnects above and below vertical ferroelectric memory cells improve 3D integration and reduce disturbance defects.
Wide-bandgap bipolar transistors limit line current with lower losses while improving short-circuit and lightning protection in HVDC power lines.
Edge-spanning crack detection electrodes use existing conductive layers to detect display cracks early and help prevent moisture and oxygen ingress.