Vibration measuring device based on micro opto-electromechanic system

Abstract

A vibration measurement device based on micro-opto-electro-mechanical systems, which is composed of micro-opto-electro-mechanical systems for sensitive vibrations and signal processing circuits. The micro-opto-mechanical systems for sensitive vibrations consists of a single detection optical fiber and a film sensitive to vibrations on a silicon substrate The diaphragm is sensitive to the vibration signal, and the vibration signal is read out through the readout method of a single detection optical fiber, and then transmitted to the subsequent signal processing circuit by the same single optical fiber, and the sensitive signal is photoelectrically converted, amplified, and filtered. , to extract the vibration signal. Among them, the microstructure element adopts the diaphragm structure etched on the semiconductor substrate. By controlling the processing technology of the semiconductor substrate, the cantilever beam structure, thickness, area size, shape, reflectivity and surface wrinkle texture of the diaphragm can be changed. , to achieve the purpose of enhancing the detection capability of the system. The invention can reduce the size of the sensitive part of the detection device to the same level as that of the optical fiber, and has the advantages of low power consumption, simple structure and easy realization.

Description

technical field [0001] The invention relates to a vibration measuring device based on a micro-optical electromechanical system, which belongs to the optical fiber sensing technology in the micro-optical electromechanical system. Background technique [0002] Compared with the traditional mechanical system, the design of the vibration detection system using microstructure and optical readout has many advantages: because it uses optical signal readout, it can realize non-contact measurement without affecting the system performance. The precision system will not cause damage to the surface of the system; the optical signal is read out, and the optical signal intensity required is very small, so the power consumption required by the system is very small; different spectra can be selected to achieve visualization or non-visualization of the measurement; Using the optical fiber structure to read out, because the optical fiber itself is small, it can realize the miniaturization of ...

AI Technical Summary

Problems solved by technology

At present, the detection structure of the reflective intensity type optical fiber vibration measurement system mainly includes fiber pair type and multi-fiber type, but because the above structure uses more than one optical fiber, the complexity of implementation increases, and the size of the detection part increases

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