Chromium-doped non-crystalline graphite ware reducing coating layer and preparation process thereof

An amorphous, coating technology, applied in chemical instruments and methods, coatings, layered products, etc., can solve problems such as low hardness, and achieve the effect of uniform thickness and high bonding strength

Inactive Publication Date: 2007-07-18
XIAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the disadvantage of graphite coating is low hardness. Therefore, seeking a preparation technology that can retain the anti-friction properties of graph

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] After cleaning and drying the workpiece, put it into the vacuum chamber of the 4-target magnetron sputtering ion plating equipment, and evacuate to 3.3×10 -3 Pa, into the argon, the flow: 10sccm. Perform ion bombardment cleaning for 20 minutes, adjust the negative bias value to -400V, turn on two pure chromium metal targets, and the target current range is 0.5A. Carry out the coating process, adjust the negative bias voltage to -80V, and turn on 4 metal targets at the same time: 2 pure graphite targets and 2 pure chromium metal targets, among which the target current of graphite is 1.65A, and the target current of chromium is 0.2 A, the time is 150 minutes. The coating obtained by the process is an amorphous graphite coating containing 4.6% (mass percentage) of metallic chromium, the coating has a hardness of 2050HV, a coefficient of friction of 0.09, and a thickness of 1.2 μm.

Embodiment 2

[0025] After cleaning and drying the workpiece, put it into the vacuum chamber of the 4-target magnetron sputtering ion plating equipment, and evacuate to 3.9×10 -3 Pa, into the argon, the flow: 12sccm. Perform ion bombardment cleaning for 15 minutes, adjust the negative bias value to -300V, turn on two pure chromium metal targets, and the target current range is 0.4A. Carry out the coating process, adjust the negative bias voltage to -75V, and turn on 4 metal targets at the same time: 2 pure graphite targets and 2 pure chromium metal targets, among which the target current of graphite is 2.5A, and the target current of chromium is 0.3 A, the time is 120 minutes. The coating obtained by the process is an amorphous graphite coating containing 3.0% (mass percentage), the hardness of the coating is 1650HV, the coefficient of friction is 0.11, and the thickness is 1.1 μm.

Embodiment 3

[0027] After cleaning and drying the workpiece, put it into the vacuum chamber of the 4-target magnetron sputtering ion plating equipment, and evacuate to 5.3×10 -3 Pa, into the argon, the flow: 12sccm. Perform ion bombardment cleaning for 30 minutes, adjust the negative bias value to -350V, turn on two pure chromium metal targets, and the target current range is 0.4A. Carry out the coating process, adjust the negative bias to -65V, and turn on 4 metal targets at the same time: 2 pure graphite targets and 2 pure chromium metal targets, among which the target current of graphite is 2.0A, and the target current of chromium is 0.15 A, the time is 180 minutes. The coating obtained by this process is an amorphous graphite coating containing 6.3% (mass percent) metallic chromium, the coating has a hardness of 1950HV, a coefficient of friction of 0.08, and a thickness of 1.5 μm.

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Abstract

The Cr-doped graphite coating consists of Cr in 3-8 wt% and amorphous graphite, has thickness of 1.0-1.5 microns, and possesses hardness as high as 1500-2200 HV, frication coefficient as low as 0.08-0.12 and self-lubricating function. The Cr-doped graphite coating is prepared with one four-target closed field unequilibrated magnetically controlled sputtering equipment and through the steps of vacuumizing, ion bombardment to clean, coating, etc. The process of preparing antifriction Cr-doped graphite coating is simple, stable and able to making high precision antifriction coating.

Description

technical field [0001] The invention belongs to the technical field of material surface modification, and relates to a chromium-doped amorphous graphite anti-friction coating, and also relates to a preparation method of the anti-friction coating. Background technique [0002] For the improvement of coating performance, it is mainly achieved by improving the wear resistance of the coating (requiring the coating to have high hardness and bonding strength) and reducing friction (requiring the coating to have a low friction coefficient). The solid lubricating material that can be used in the coating is most commonly used MoS 2 . Under light load and vacuum environment, MoS 2 Anti-friction performance is very superior. But MoS 2 One disadvantage is that it has strong hygroscopicity, and the friction coefficient and wear amount increase sharply under a certain relative humidity. In recent years, due to its good mechanical and tribological properties (high hardness, low fricti...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/35C23C14/54B32B15/04C10M103/00
Inventor 蒋百灵张国君
Owner XIAN UNIV OF TECH
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