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Molded article for clean room and method for producing same

A manufacturing method and clean room technology, applied in the field of molded products for clean rooms, can solve the problems of lack of wear resistance and pollution resistance, achieve excellent dimensional accuracy, excellent wear resistance, and suppress the generation of particles Effect

Active Publication Date: 2007-08-01
FUJI BAKELITE +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Patent Document 3 describes that the resin composition is excellent in impact strength, especially low-temperature impact properties, but there is no description about abrasion resistance, and there is no description about stain resistance.

Method used

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  • Molded article for clean room and method for producing same
  • Molded article for clean room and method for producing same
  • Molded article for clean room and method for producing same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0198] Raw materials (A) to (E) used in this example are as follows.

[0199] Cyclic olefin polymer (A):

[0200] Ethylene and tetracyclines [4.4.0.1 2，5 .1 7，10 ]-3-dodecene (hereinafter sometimes abbreviated as "TCD-3") random copolymer (ethylene-TCD-3 random copolymer). by 13 The ethylene content measured by C-NMR was 62 mol%, the intrinsic viscosity [η] measured in decahydronaphthalene at 135°C was 0.60 dl / g, and the glass transition temperature (Tg) was 105°C. The MFR measured at 230° C. (measured under a load of 2.16 kg according to ASTM D1238) was 8.2 g / 10 minutes. The structural formula of TCD-3 is as follows.

[0201]

[0202] ·Soft copolymer (B):

[0203] Mitsui Chemicals Co., Ltd. ethylene-propylene random copolymer "P-0880". The ethylene content is 80 mol%, the glass transition temperature (Tg) is -54°C, the MFR (measured at 230°C under a load of 2.16kg according to ASTM D1238) is 0.4g / 10min, and [η] is 2.5dl / g, The density is 0.867g / cm 3 , the degree o...

Embodiment 2

[0228] Using the "pellets c" produced in Example 1, injection molding was performed in the same manner as in Example 1, and the total amount of outgassing, Taber abrasion, silicon wafer scratch abrasion, and surface resistivity were evaluated. These results are summarized in Table 1.

Embodiment 3

[0230] In Example 1, instead of supplying "pellet c" and carbon fiber to a twin-screw extruder produced by Plastic Engineering Research Institute Co., Ltd. for melt kneading, carbon fiber was not supplied, and only "pellet c" was supplied, while forced degassing Only by kneading, "granule e" was obtained. The raw material compounding ratio of "granule e" is the same as that of "granule c". Using "pellets e", the same procedure as in Example 1 was carried out, and the total amount of outgassing and the surface resistivity of the obtained injection molded article were measured. The results are shown in Table 1.

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Abstract

Provided is a shaped article for clean rooms comprising a resin composition prepared by melt-kneading 100 parts by weight of a cyclic olefin polymer (A) having a glass transition temperature of from 60 to 200 DEG C, from 1 to 150 parts by weight of a flexible copolymer (B) prepared by polymerizing at least two monomers selected from a group consisting of olefins, dienes and aromatic vinyl-hydrocarbons, and having a glass transition temperature of 0 DEG C or lower, from 0.001 to 1 part by weight of a radical initiator (C), and from 0 to 1 part by weight of a polyfunctional compound (D) having at least two radical-polymerizable functional groups in the molecule. The shaped article for clean rooms has good chemical resistance, heat resistance and dimensional accuracy, it is inhibited from releasing a volatile component around it, and it has good abrasion resistance and is inhibited from producing particles.

Description

technical field [0001] The present invention relates to a molded article for a clean room, and particularly to a molded article for a clean room containing a resin composition obtained by melt-kneading a cyclic olefin polymer, a soft copolymer, and a radical initiator. Moreover, it is related with the manufacturing method of the molded article for clean rooms mentioned above. Background technique [0002] Silicon wafers in the semiconductor manufacturing process, glass substrates in the liquid crystal panel manufacturing process, and metal disks in the hard disk manufacturing process are handled in clean rooms to prevent contamination. In these manufacturing processes, various resin molded products are used for containers, trays, tweezers, and the like for efficiently handling these substrates. For example, jigs such as containers for storing multiple substrates at the same time, containers for transporting from a specific process to the next process in a clean room, contai...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C08L45/00C08L23/08C08L23/16C08L53/02C08L25/10C08L65/00C08K5/00
CPCC08L65/00C08K5/0025C08K5/14
Inventor 坂本贵树白发准近内则行小林隆行金子和义广瀬敏行中西圭太永井浩晃
Owner FUJI BAKELITE
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