Preparation method of echo wall die laser cavity based on zinc oxide single crystal micronano dish

A zinc oxide single crystal, whispering gallery mode technology, applied in the field of zinc oxide micro/nano laser cavity, can solve the problems of high WGM laser threshold, low quality factor Q value, complex preparation process, etc., to reduce scattering loss and substrate Loss caused by absorption, the effect of simple method and simple preparation process

Inactive Publication Date: 2007-10-03
南通东海机床制造集团有限公司 +1
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Problems solved by technology

However, the preparation process of this method is complex, the scattering of light by particles and the absorption of light by the substrate are serious, the obtained WGM laser threshold is high, and the quality factor Q value is low.

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  • Preparation method of echo wall die laser cavity based on zinc oxide single crystal micronano dish
  • Preparation method of echo wall die laser cavity based on zinc oxide single crystal micronano dish
  • Preparation method of echo wall die laser cavity based on zinc oxide single crystal micronano dish

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Embodiment Construction

[0016] A method for preparing a whispering gallery mode laser cavity based on zinc oxide single crystal micro-nano discs, using zinc powder with a mass content greater than or equal to 99.99% as a reaction raw material, and oxygen with a mass concentration greater than or equal to 99.99% as a reaction gas. Silicon wafer or sapphire wafer is used as the substrate, and nitrogen is used as the transport gas to keep the zinc powder at a temperature of 700-800°C. The zinc powder is evaporated into zinc vapor, and the zinc vapor is transported to the substrate area by nitrogen. At a temperature of 400-500 It is deposited on the substrate at ℃ and oxidized into zinc oxide nuclei, and finally grows from these nuclei into a micro / nano-sized hexagonal symmetrical disc structure, and the above reaction will be completed within 30-60 minutes. In this embodiment, the mass content of zinc powder is 99.99% or 99.999%, the mass concentration of oxygen is 99.99% or 99.999%, the heating evaporat...

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Abstract

A process for preparing the sound reflection-mode laser cavity based on micron-(or nono-) disc of zinc oxide monocrystal includes such steps as providing Zn powder as raw material, O2 as reaction gas, Si (or sapphire) chip as substrate, and N2 as delivering gas, evaporating Zn powder at 700-800 deg.C, carrying the Zn vapor to substrate at 400-500 deg.C by N2, depositing while oxidizing to obtain zinc oxide crystal kernels, and growing to become symmetric hexagonal micron- (or nano-) discs.

Description

technical field [0001] The present invention prepares a six-fold symmetrical disc-shaped zinc oxide micro / nano structure by a simple gas phase transport method, and builds a whispering gallery mode (WGM) zinc oxide micro / nano laser cavity based on this, especially refers to a zinc oxide single crystal based A preparation method for a whispering gallery mode laser cavity of a micro-nano dish. Background technique [0002] Zinc oxide (ZnO), as a semiconductor material with a wide direct bandgap (3.34eV), has become a hot material for low-threshold semiconductor ultraviolet lasers and optoelectronic devices due to its strong exciton binding energy (60meV). From large-scale bulk single crystals, thin film materials to micro-nano-structured ZnO, its ultraviolet luminescence, especially ultraviolet laser, is the most concerned research hotspot. People hope to develop new short-wave optoelectronic devices based on ZnO materials, such as ultraviolet laser diodes, ultraviolet light-...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01G9/02B82B3/00
Inventor 徐春祥朱光平李欣刘金平郑科
Owner 南通东海机床制造集团有限公司
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