Method for depositing magnetic film on flexible substrate

A magnetic thin film and flexible substrate technology, applied in metal material coating process, ion implantation plating, coating, etc., can solve the problems of waste of raw materials, long time consumption, etc., and achieve the effect of reducing serious pollution

Inactive Publication Date: 2008-01-09
CHINA BANKNOTE PRINTING & MINTING
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] To form a thin film with a pattern in the above-mentioned traditional process, it must go through two processes of coating and masking, which tak

Method used

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  • Method for depositing magnetic film on flexible substrate
  • Method for depositing magnetic film on flexible substrate

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] The flexible substrate selected in this embodiment is paper, which is continuously unwound by the unwinding roller 4, and the paper is conveyed to the coating chamber 3 by the guide rollers 6 and 7, the tension roller 8 and the pressing roller 9. The synchronous travel of the mask plate and the substrate provided with the barcode pattern in the working direction and the vertical working direction is realized by three guide rollers such as the guide roller 15 , and the tension roller 8 and the pressure roller 9 . After passing through the above-mentioned overall transmission, the paper and the mask plate enter the coating chamber. After entering the coating chamber, the paper is closer to the cooling roller and the mask is closer to the target chamber. Fe-Mo-Mn-B-Si alloy targets are installed in the five target chambers, so that when the mask and the paper run synchronously along the working direction (x direction), the thin film deposition interval of each target chamb...

Embodiment 2

[0037] The flexible substrate selected in this embodiment is paper, which is continuously unwound by the unwinding roller 4, and the paper is conveyed to the coating chamber 3 by the guide rollers 6 and 7, the tension roller 8 and the pressing roller 9. The synchronous travel of the mask plate and the substrate provided with the barcode pattern in the working direction and the vertical working direction is realized by three guide rollers such as the guide roller 15 , and the tension roller 8 and the pressure roller 9 . After passing through the above-mentioned overall transmission, the paper and the mask plate enter the coating chamber. After entering the coating chamber, the paper is closer to the cooling roller and the mask is closer to the target chamber. Fe-Mo-Mn-B-Si alloy targets are installed in the three target chambers, so that when the mask and the paper run synchronously along the working direction (x direction), the thin film deposition interval of each target cham...

Embodiment 3

[0039] The flexible substrate selected in this embodiment is PET, which is continuously unwound by the unwinding roller 4, and the PET is conveyed to the coating chamber 3 by the guide rollers 6 and 7, the tension roller 8 and the pressing roller 9. The synchronous travel of the mask plate and the substrate provided with the barcode pattern in the working direction and the vertical working direction is realized by three guide rollers such as the guide roller 15 , and the tension roller 8 and the pressure roller 9 . After passing through the above-mentioned overall transmission, PET and mask board enter the coating chamber. After entering the coating chamber, the PET is close to the cooling roll and the mask plate is closer to the target chamber. Fe-Mo-Mn-B-Si alloy targets are installed in the three target chambers, so that when the mask and PET run synchronously along the working direction (x direction), the film deposition interval of each target chamber At the same time, t...

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Abstract

Vacuum winding-electroplating magnetic film on flexible substrates by deposition process is carried out by: assembling magnetic mask plates in vacuum winding electroplating apparatus to move in a direction same as the substrates do synchronously, installing magnets on top of target cabin of film plating chamber to form magnetic path between the magnets and magnetic mask plates, and electroplating film on the flexible substrates by sputtering or evaporating process. It effectively makes continuous 2D pattern on a large area of substrates with controlled magneto-anisotropy, and without environment pollution.

Description

technical field [0001] The invention relates to a vacuum winding plating method for depositing a magnetic thin film on a flexible base material, belonging to the field of winding coating technology. Background technique [0002] As the market demand for electronic products continues to increase, correspondingly, the demand for thin film products required for electronic devices is also gradually increasing. Therefore, on the basis of ensuring the quality of the film, it is very important to realize continuous and large-scale film production in the vacuum web coating process by improving the coating process. [0003] Chinese patent CN2433262Y discloses a multi-target magnetron sputtering winding coating machine, which includes a winding chamber, a coating chamber and auxiliary devices. At least two pairs of twin intermediate frequency magnetron sputtering targets and three DC magnetron sputtering targets are arranged around the cooling roller in the coating chamber. There is...

Claims

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Application Information

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IPC IPC(8): C23C14/56C23C14/34C23C14/54
Inventor 曹瑜李新宇潘峰李晓伟
Owner CHINA BANKNOTE PRINTING & MINTING
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