Laminated film
A technology of metal laminated film and composition, which is applied in the manufacture of electrical components, circuits, semiconductors/solid-state devices, etc., can solve problems such as damage to glass substrates, and achieve the effects of improved coverage, easy control of cone angle, and excellent economy
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1~26
[0054] As shown in FIG. 1 , a substrate in which titanium (700 Ȧ) / aluminum (2500 Ȧ) / titanium (200 Ȧ) was deposited on a glass substrate (1) by a sputtering method was prepared.
[0055] Then, a resist (4) was used to form a pattern on the glass / titanium / aluminum / titanium metal laminated film, and immersed in the etching solution (aqueous solution containing the components described in each example) of Examples 1 to 26 in Table 1. Medium (etching temperature is 30°C). Thereafter, after washing with ultrapure water and drying with nitrogen gas, the shape of the substrate was observed with an electron microscope. The results are shown in Table 1.
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com