Method for producing micro-optical element by hot imprint technology
A micro-optical and hot embossing technology, applied in optical components, optics, opto-mechanical equipment, etc., to achieve the effects of low cost, good process realization, and high radiation damage resistance threshold
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Embodiment 1
[0046] To make a binary optical lens with a multi-step relief structure, the element material and the stamper material are both quartz, and the polymer required for hot embossing is polymethyl methacrylate (PMMA). The specific process is as follows:
[0047] 1. According to the process flow shown in Figure 1, laser direct writing technology is used to make a surface relief stamper complementary to the target structure, as shown in Figure 2(a).
[0048] 2. Apply thermal embossing to reversely replicate the structure on the stamper to the PMMA on the substrate, as shown in Figure 2(b).
[0049] 3. Using the PMMA pattern as a mask, a reactive ion etching technique is used to obtain a multi-step relief structure on the quartz substrate, as shown in FIG. 2(c).
Embodiment 2
[0051] Fabricate a binary optical lens with a continuous relief structure as shown in Figure 3, the element material is quartz, the die material is single crystal silicon, and the polymer is aromatic ring polymer PPM. The specific process is as follows:
[0052] 1. According to the process flow shown in Figure 1, use the electron beam direct writing technique to make a continuous relief stamper with a complementary structure to the target, as shown in Figure 4(a).
[0053] 2. Apply thermal embossing to reversely copy the relief structure on the stamper to the PPM on the substrate, as shown in Figure 4(b).
[0054] 3. Using the PPM pattern as a mask, apply reactive ion etching technology to obtain a continuous relief structure on the quartz substrate, as shown in Figure 4(c).
Embodiment 3
[0056]Replicate the microlens array with a continuous relief structure as shown in Figure 5(a), the element material is glass, and the polymer is PMMA. First, the original microlens array is used as a stamper to obtain a transition piece with a complementary surface relief structure, which is made of quartz, as shown in Figure 6(a). Then the transition piece is used as a pressing mold to obtain a microlens array consistent with the relief structure of the original lens. The specific process is as follows:
[0057] 1. The first imprint
[0058] a) The relief structure of the original microlens array is reversely copied to the PMMA on the substrate by thermal embossing, as shown in Fig. 5(b).
[0059] b) Using the PMMA pattern as a mask, a continuous relief structure is obtained on the quartz substrate by applying reactive ion etching technology, as a transition piece for replication, as shown in Figure 5(c).
[0060] 2. The second imprint
[0061] c) Thermal embossing was u...
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