Device and method for preparing metallic titanium by TiCl4 vacuum glow discharge
A technology of glow discharge and metal titanium, which is applied in the field of metal material metallurgy to achieve the effects of high efficiency, simple device structure and reasonable design
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Embodiment 1
[0015] The technical pure TiCl that will be vaporized in the vaporization device 4 4 , pass through the gas flow controller 10 and the vaporization pipeline 5 until the background vacuum reaches 5×10 -3 Pa vacuum chamber 3, controlled TiCl 4 The pressure is 1000Pa, and a negative voltage of 5000V is applied to the collector 1 (cathode) insulated from the vacuum chamber 3 through a DC power supply 9, and the anode 2 insulated from the vacuum chamber 3 generates gas ionization, forming in the region 7 of the two electrodes Glow plasma, under the action of electric field, TiCl 4 The titanium cations in the plasma generated by gas ionization are deposited on the surface of the collector 1 made of sponge-like titanium, and the chlorine gas generated by the discharge is absorbed by the gas collector 8 through the chlorine gas pipeline 6 and stored. After 4 hours of continuous treatment, 10.7Kg of titanium with an oxygen content of less than 0.01% and a chlorine content of less tha...
Embodiment 2
[0017] The technical pure TiCl that will be vaporized in the vaporization device 4 4 , pass through the gas flow controller 10 and the vaporization pipeline 5 until the background vacuum reaches 5×10 -3 Pa vacuum chamber 3, controlled TiCl 4 The pressure is 500Pa, and a negative voltage of 3000V is applied to the collector 1 (cathode) insulated from the vacuum chamber 3 through a DC power supply 9, and the anode 2 insulated from the vacuum chamber 3 generates gas ionization, forming in the region 7 of the two electrodes Glow plasma, under the action of electric field, TiCl 4 The titanium cations in the plasma generated by gas ionization are deposited on the surface of the collector 1 made of sponge-like titanium, and the chlorine gas generated by the discharge is absorbed by the gas collector 8 through the chlorine gas pipeline 6 and stored. After 10 hours of continuous treatment, 5.6 kg of titanium with an oxygen content of less than 0.01% and a chlorine content of less tha...
Embodiment 3
[0019] The technical pure TiCl that will be vaporized in the vaporization device 4 4 , pass through the gas flow controller 10 and the vaporization pipeline 5 until the background vacuum reaches 5×10 -3 Pa vacuum chamber 3, controlled TiCl 4 The pressure is 100Pa, and a negative voltage of 800V is applied to the collector 1 (cathode) insulated from the vacuum chamber 3 through a DC power supply 9, and the anode 2 insulated from the vacuum chamber 3 generates gas ionization, forming in the region 7 of the two electrodes Glow plasma, under the action of electric field, TiCl 4 The titanium cations in the plasma generated by gas ionization are deposited on the surface of the collector 1 made of sponge-like titanium, and the chlorine gas generated by the discharge is absorbed by the gas collector 8 through the chlorine gas pipeline 6 and stored. After 8 hours of continuous treatment, 1.3Kg of titanium with an oxygen content of less than 0.01% and a chlorine content of less than 0...
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