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Method for preparing metal-base lubricating film by low temperature ion plating

A lubricating film and metal-based technology, which is applied in the field of ion plating to prepare metal-based lubricating films, can solve the problems that the properties of lubricating films cannot meet the requirements, and achieve the effect of high bonding force and good lubricating performance

Inactive Publication Date: 2008-03-19
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The performance of the prepared lubricating film is difficult to meet the requirements under certain working conditions

Method used

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  • Method for preparing metal-base lubricating film by low temperature ion plating

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0027] The metal Ag target (purity ≥ 99.9wt%) is processed into a cylinder with a diameter of 80mm and a height of 40mm, and installed on the target port of the ion coating machine; a 9Cr18 steel substrate with a diameter of 30mm and a thickness of 5mm is installed on the sample fixture. The target distance is 100 mm, and the angle between the normal of the substrate surface and the normal of the target surface is 15°. Install a platinum resistance Pt100 on the bonding surface of the substrate and the fixture, and communicate with the temperature detection host computer to detect the deposition temperature of the substrate. Turn on the vacuum pump group, the background vacuum reaches 5.9×10 -3 Above Pa. Introduce Ar gas to maintain the partial pressure of Ar gas at 1.8Pa-2.0Pa. Turn on the DC bias power supply, apply -1500V DC bias to the sample, Ar + Ion bombardment for 10 min. Liquid nitrogen was passed into the sample holder, and the temperature of the substrate was mon...

Embodiment 2

[0029] The target is replaced with a Cu target, and its installation and pretreatment process are the same as in Example 1. When the substrate temperature reaches -147°C, reduce the partial pressure of Ar gas to 8.0×10 -1 Pa, adjust the DC bias voltage to -200V, energize the target, adjust the target voltage to 20V, target current to 70A, start to deposit the film, and the deposition time is 6min. After the coating substrate returned to room temperature naturally, the coating substrate was taken out, and the results showed that the low-temperature ion-plated Cu film crystallized well. Electron microscope observation shows that the thin film has a compact structure and no obvious defects.

Embodiment 3

[0031] The target is replaced with an AgCu alloy target, and a single crystal silicon wafer is used as a substrate, and the installation and pretreatment process are the same as those in Example 1. When the substrate temperature reaches -85°C, reduce the partial pressure of Ar gas to 8.0×10 -1 Pa, adjust the DC bias voltage to 0V, energize the target, adjust the target voltage to 20V, target current to 80A, start to deposit the film, and the deposition time is 5min. Take it out after the coating substrate naturally returns to room temperature. The results showed that a good AgCu film was obtained on the single crystal silicon substrate.

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Abstract

The present invention discloses a method for preparing metal matrix lubrication film by low temperature ion plating. The method uses the ion plating technology and adopts a specimen holder cooled by liquid nitrogen to clamp the matrix of the film to be plated, the liquid nitrogen is added to the specimen holder during the film plating process, thereby the matrix gets low temperature, and the metal matrix lubrication film is deposited on the surface of the low temperature matrix. The film preparation method has the advantages that the matrix gets the low temperature condition during the film depositing process, simultaneously the selections of the main film plating parameters of the direct-current bias, the target current, the voltage and the depositing atmosphere partial pressure, etc. are not influenced. The metal matrix lubrication film prepared with the method has high binding force with the matrix and good lubrication performance, and thereby the method is a metal matrix lubrication film preparation method with application potential.

Description

technical field [0001] The invention relates to a method for preparing a metal-based lubricating film by ion plating at low temperature. Specifically, the invention relates to a method for depositing a metal-based lubricating film on a low-temperature cooled substrate by using an ion coating device. Background technique [0002] Metals such as Ag, Ni, Cu, Pb, Au and their alloys are deposited on the surface of precision moving parts to prepare a layer of single-layer or composite / multi-layer film, which can lubricate in vacuum, radiation and high and low temperature environments. The metal-based lubricating film prepared by ion plating technology has been widely used due to its strong adhesion, good diffractive properties and good tribological properties of the deposited metal-based lubricating film. In recent years, with the rapid development of aerospace, nuclear energy and other fields, higher requirements have been put forward for solid lubricating film materials. The ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/46C23C14/06C23C14/54
Inventor 胡明孙嘉奕翁立军刘维民高晓明李陇旭汪晓萍罗正义杨军伏彦龙
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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