High sensitivity nano biosensor production method
A biosensor and high-sensitivity technology, which is applied in the field of high-sensitivity nano-biosensor production, can solve the problems of low detection sensitivity and achieve the effect of improving detection sensitivity and enhancing strength
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Embodiment 1
[0031] The specific process of embodiment 1 of the present invention is:
[0032] (1) Utilize the extended nanosphere imprinting (NSL) technology developed in our laboratory to fabricate a diamond-shaped silver nanoarray with an array period of 440nm, a metal silver surface inner width of 140nm, and a surface outer height of 47nm on a K9 glass substrate. The cross-sectional view is as follows As shown in Figure 1;
[0033] The fabrication method of rhombus structure array is as follows:
[0034] (a) Blow dry with nitrogen after thoroughly cleaning the substrate;
[0035] (b) two kinds of monodisperse nanospheres with a diameter of about 440nm and about 200nm are mixed evenly and then added dropwise on the surface of the substrate to realize self-assembly;
[0036] (c) Reactive ion etching (RIE) technology is used to etch the self-assembled monolayer of nanospheres, and the 200nm nanospheres are completely etched away;
[0037] (d) Deposit thickness is the metal silver of ab...
Embodiment 2
[0046] The specific process of embodiment 2 of the present invention is:
[0047] (1) Utilize the extended nanosphere imprinting (NSL) technology developed in our laboratory to fabricate a diamond-shaped silver nanoarray with an array period of 400nm, a metal silver surface inner width of 110nm, and a surface outer height of 50nm on a quartz glass substrate. The cross-sectional view is as follows As shown in Figure 1;
[0048] The fabrication method of rhombus structure array is as follows:
[0049] (a) Blow dry with nitrogen after thoroughly cleaning the substrate;
[0050] (b) two kinds of monodisperse nanospheres with a diameter of about 400nm and about 180nm are mixed evenly and then added dropwise on the surface of the quartz substrate to realize self-assembly;
[0051] (c) Reactive ion etching (RIE) technology is used to etch the self-assembled monolayer of nanospheres, and the 180nm nanospheres are completely etched away;
[0052] (d) Deposit thickness is the metal s...
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