Coated cutting tool
A cutting tool and coating technology, applied in the field of coated cutting tools
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[0026] Using the RF sputtering PVD method, aperiodic stacked multilayers consisting of alternating metal oxide + metal oxide nanocomposite Al were deposited on the substrate 2 o 3 +ZrO 2 layer and Al 2 o 3 layer.
[0027] Through the high-purity oxide target, different process conditions are applied according to the temperature and the ratio of zirconia and alumina to deposit the nanocomposite layer. By applying one power level to the zirconia target and a separate power level to the alumina target, the content of both oxides in the nanocomposite layer formed was controlled. Alumina is added to a zirconia flux with the aim of forming a composite material with metastable ZrO 2 Mutually. For this example, the target power level on each oxide target was 80W. The sputtering speed was adjusted to obtain twice the at-% zirconium compared to aluminum. The oxygen:metal atomic ratio was 94% of the stoichiometric oxygen:metal atomic ratio.
[0028] Al was deposited using an alu...
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