Nuclear magnetic resonance spectrum detection plane micro coil and its manufacture method

Abstract

The invention discloses a nuclear magnetic resonance testing planar micro coin and a method for production. A planar micro coin (1) takes a spiral shape and is located on the upper surface of an insulating substrate (2), and the planar micro coin (1) is made of copper. The material of the insulating substrate (2) is glass or polymer. The planar micro coin (1) is provided with an inside end pad and an outside end pad (4, 5), the planar micro coin (1) is integrated with the corresponding two ends pads, and thereby a copper micro electroplating is formed. The thickness of the pads (4, 5) is same with the thickness of the planar micro coin (1). The method for production of the planar micro coin (1) comprises a photoresist mask process and a copper micro electroplating process, wherein the photoresist mask process is used for making masks which are used for micro electroplating, while the copper micro electroplating process is used for making the planar micro coils of micrometer structure preciseness in photoresist mask. The planar micro coils of the invention can be used for component and molecular structural analysis of nuclear magnetic resonance upgrading samples, and can be used for nuclear magnetic resonance micro-imaging as tests for mono cells.

Description

technical field [0001] The invention relates to a planar microcoil for nuclear magnetic resonance detection and a manufacturing method thereof, in particular to a planar microcoil for nuclear magnetic resonance spectrum detection of trace chemical samples and a manufacturing method thereof. Background technique [0002] NMR micro-detection technology is developed on the basis of conventional NMR detection technology. Conventional NMR detection technology refers to: based on the principle of nuclear magnetic resonance, using a 5mm solenoid probe to analyze the molecular composition and structure of bio-chemical samples , biological tissue analysis, pathological analysis, medical diagnosis and non-destructive monitoring of industrial products, etc. However, compared with other mature chemical analysis techniques, the mass sensitivity of conventional NMR detection techniques is relatively small, the minimum is only 10 -9 mol. Swiss scientist C.Massin found (C.Massin, F.Vincen...

AI Technical Summary

Problems solved by technology

[0008] The technical problem to be solved by the present invention is that the micro-spiral micro-coil of the prior art is not easy to manufacture, difficult to integrate with the micro-analysis system, and the problem of low detection sensitivity. A method for making a planar micro-coil is proposed. Mechanical system process photoresist mask molding and copper micro-plating method, the fabricated planar micro-coil can significantly improve the detection sensitivity of nuclear magnetic resonance

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