Flexible water-cooling metal electrode for monocrystalline furnace

A metal electrode, single crystal furnace technology, applied in ohmic resistance electrodes, crystal growth, ohmic resistance heating parts and other directions, can solve the problem of difficulty in adjusting the position of the heater, reduce the difficulty, reduce manufacturing costs, reduce processing and The effect of assembly accuracy requirements

Inactive Publication Date: 2008-06-25
GRINM ELECTRO OPTIC MATERIALS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, due to aging deformation and other factors, the position of the heater will change. When the position of the heater needs to be finely adjusted, it is difficult to adjust the position of the heater with the columnar electrode.

Method used

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  • Flexible water-cooling metal electrode for monocrystalline furnace
  • Flexible water-cooling metal electrode for monocrystalline furnace

Examples

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Embodiment Construction

[0014] see figure 1 Shown: a flexible water-cooled metal electrode for a single crystal furnace, which includes a water-cooled copper tube electrode 3, a stainless steel electrode clamp 4, and a copper sealing sleeve 2. The water-cooled copper tube electrode 3 is a complete water-cooled For the copper tube, a complete water-cooled copper tube is used to pass through the stainless steel electrode clamp 4, and the stainless steel electrode clamp 4 and the water-cooled copper tube are well welded with alloy solder to ensure smooth transmission of current and heat. Then the water-cooled copper pipe passes through the copper sealing sleeve 2 and is well welded; the upper half of the copper sealing sleeve 2 is sleeved with a copper connection ferrule 1, and the copper connection ferrule is in the shape of an opening, and is bent at the opening of the copper connection ferrule. Two splints 5 are folded and protruded, and fastening bolts 7 for tightly connecting the copper ferrule 1 a...

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PUM

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Abstract

The invention relates to a flexible water-cooling metal electrode used for a mono-crystal furnace, comprising a water-cooling copper pipe electrode, a stainless steel terminal clamp and a copper gland cover, wherein, the lower part of the water-cooling copper pipe electrode is welded with the stainless steel terminal clamp, and a water-cooling cycle is formed; the upper part of the water-cooling copper pipe electrode passes through the copper gland cover and is hermetically welded with the copper gland cover; the water-cooling copper pipe electrode is a complete water-cooling copper pipe which passes through the stainless steel terminal clamp and then returns back to the stainless steel terminal clamp to form a water-cooling cycle. Because the water-cooling copper pipe has an ability of plastic deformation and can be properly deformed under an exogenic action, thereby a position of the stainless steel terminal clamp can be conveniently moved within a certain range, and then a position of a connecting point between a stainless steel electrode and a graphite electrode and a heater. The invention is favorable for removing errors caused by factors like processing, assembly, time-dependent deformation and so on, and for accurately fixing the heater, thereby a good thermal field is obtained.

Description

technical field [0001] The invention relates to the technical field of single crystal furnaces, and relates to a flexible water-cooled metal electrode for single crystal furnaces. Background technique [0002] Currently, in single crystal furnaces, the position of the graphite heater needs to be precisely fixed to maintain a reasonable thermal field. The heater position is mainly determined by the electrode position. Generally, the electrodes of the single crystal furnace heater are made of copper or stainless steel, generally in the form of a columnar structure, connected to the graphite electrode and the heater, and there is a circulating water channel in the columnar copper / stainless steel electrode, and the columnar electrode is taken away by water cooling due to the large current. The heat and the heat conducted by the high-temperature heater ensure the reliability of the seals related to the columnar copper / stainless steel electrodes and that the columnar electrodes d...

Claims

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Application Information

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IPC IPC(8): C30B35/00H05B3/03
Inventor 屠海令张峰燚冯德伸苏小平杨海
Owner GRINM ELECTRO OPTIC MATERIALS
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