Method for coating fluoroparylene and special coating device

A technology of p-xylene and coating equipment, which is applied in the direction of coating, metal material coating process, gaseous chemical plating, etc., and can solve the problems of high penetration ability, high requirements for hardware coating equipment, and low permeability. Achieve the effects of reducing costs, simplifying coating equipment, and reducing transitional carbonization

Inactive Publication Date: 2008-08-13
SHANGHAI RECORD PHARM CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Parylene (structure I) is a commonly used coating material. It is a good dielectric material with high dielectric strength and a dielectric constant that does not change with frequen...

Method used

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  • Method for coating fluoroparylene and special coating device
  • Method for coating fluoroparylene and special coating device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] Referring to the accompanying drawings, the fluorinated parylene coating improvement equipment includes a gasification cracking chamber 1, a polymerization deposition chamber 6, a cold trap 19, a throttle valve 20, a vacuum mechanical pump 21, and a refrigerator 18. The gasification and cracking chamber has a gasification boat 2, a stainless steel cracking chamber 4, and an electric heating tube 3 is installed outside the stainless steel cracking chamber. The gasification and cracking chamber communicates with the polymerization deposition chamber 6 through a pipeline 5.

[0034] The polymerization deposition chamber 6 has a vacuum bell jar 7, and the vacuum bell jar 7 is provided with a vacuum sealing ring and an observation window 13. A gas splitter 8 is arranged in the vacuum bell jar 7, and the inlet of the gas splitter is connected with the outlet of the connecting pipe of the gasification cracking chamber. , the gas splitter has a gas splitter barrel, the upper and...

Embodiment 2

[0046] Referring to the accompanying drawings, the fluorinated parylene coating improvement equipment includes a gasification cracking chamber 1, a polymerization deposition chamber 6, a cold trap 19, a throttle valve 20, a vacuum mechanical pump 21, and a refrigerator 18. The gasification and cracking chamber has a gasification boat 2, a stainless steel cracking chamber 4, and an electric heating tube 3 is installed outside the stainless steel cracking chamber. The gasification and cracking chamber communicates with the polymerization deposition chamber 6 through a pipeline 5.

[0047] The polymerization deposition chamber 6 has a vacuum bell jar 7, and the vacuum bell jar 7 is provided with a vacuum sealing ring and an observation window 13. A gas splitter 8 is arranged in the vacuum bell jar 7, and the inlet of the gas splitter is connected with the outlet of the connecting pipe of the gasification cracking chamber. , the gas splitter has a gas splitter barrel, the upper and...

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PUM

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Abstract

The invention relates to a coating method for parylene fluoride and special equipment for coating, specifically to a coating method using vapour deposition and equipment for the coating method. The coating method for parylene fluoride is gasifying parylene fluoride raw material, cracking into active monomer, the coating material is in a closed pressure vessel, with a vacuum degree of 40 to 60Pa and 250 to 350 DEG C, the active monomer is polymerization deposited on the surface of the coating material to form coating layer. The coating equipment includes gasification cracking chamber, polymerization deposition chamber, cold trap, throttle valve, vacuum mechanical pump and refrigerator, wherein the gasification cracking chamber communicates with the polymerization deposition chamber, the polymerization deposition chamber communicates with the cold trap, the vacuum mechanical pump communicates with the polymerization deposition chamber by the throttle valve, the cold trap refrigerates by the refrigerator. By the method of the invention, the parylene fluoride is firmly combined with books, documents and other files, which not only makes it possible to coat the parylene fluoride, but also improves coating efficiency and lowering coating cost.

Description

technical field [0001] The invention relates to a coating method and special coating equipment of fluorinated polyparaxylylene, especially a coating method using vapor phase deposition, and equipment used in the coating method. Background technique [0002] According to the investigation and current research analysis, it can be seen that many important materials such as ancient books, periodicals and documents in our country are already in a relatively serious state of aging, and irreparable losses will be caused if protection measures are not taken in time. In today's society, in order to preserve important text books and other materials in good condition for a long time, people choose books and documents that have been protected. At present, the most commonly used protection measures for text books and materials mainly include microfilm, deacidification and reinforcement, and wire mesh reinforcement. not long. With the advancement of technology, coating technology is gra...

Claims

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Application Information

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IPC IPC(8): C23C16/00C23C16/44C23C16/52
Inventor 张芳江
Owner SHANGHAI RECORD PHARM CO LTD
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