Production method and special equipment for zinc oxide aluminum transparent electroconductive film
A technology of transparent conductive film and zinc oxide aluminum, which is applied in the preparation of zinc aluminum oxide transparent conductive film, special equipment for realizing the above preparation method, and the field of conductive film preparation, which can solve the problem that the substrate is not resistant to high temperature, the substrate is curled and deformed, and cannot reach AZO film with high light transmission and good conductivity
Inactive Publication Date: 2009-05-13
徐 进成 +1
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Problems solved by technology
However, the chemical method, sol-gel method or sputtering method is due to the production atmosphere (in the atmosphere or 10 -2 ~10 -3 torr low vacuum), so it is impossible to provide high-quality finished products
In addition, the traditional sputtering method requires two sputtering guns for co-plating to adjust the ratio of the two plating materials, the composition of the plating is unstable, and the temperature in the chamber is very high
As for the chemical method, sol-gel method and sputtering method, when encountering substrates that need to be processed at low temperature, such as: PET (Polyethyleneterephthalate), PMMA (PolyMethylMethAcrylate), PC (Polycarbonate Ester PolyCarbonate), etc. These substrates can only withstand the working temperature of 120 ℃ ~ 200 ℃. If the working temperature exceeds this temperature, the substrate will be curled and deformed. Since the substrate is not resistant to high temperature and cannot be annealed, it cannot achieve high light transmission and good conductivity. AZO film
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[0030] In order to make the above-mentioned and other purposes, features and advantages of the present invention more obvious and understandable, the preferred embodiments are specifically cited below, and in conjunction with the accompanying drawings, the detailed description is as follows: Please refer to figure 1 As shown, the zinc-aluminum oxide transparent conductive thin film equipment of the present invention is mainly capable of plating an AZO thin film at room temperature. Among them, the vacuum sputtering chamber 1 is mainly equipped with an ion sputtering gun 2, a target 3 fixed by a target fixing base 4, and a plated product 5. The plated product 5 is sputtered by an ion beam in the vacuum sputtering chamber 1. Sputtering is carried out in the interior, and it can be plated under the condition of high vacuum at room temperature (the high vacuum condition is: 1.3 x 10 -2 ~6.6 x 10 -2 Pa), and use one ion sputtering gun 2 to plate the same or multiple materials simu...
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The invention discloses a preparation method for an aluminium zinc oxide transparent conductive film and a device thereof. The device comprises a vacuum sputtering cavity (1), and an ion sputtering gun (2), a target material fixing base (4), a target material (3) fixed by the base, and a plating product (5) are arranged inside the vacuum sputtering cavity (1). The plating product is sputtered by ion beams inside the vacuum sputtering cavity. One or a plurality of materials can be sputtered by an ion source sputtering gun under the conditions of high vacuity and room temperature. Two target materials with a single material, or the single target material integrating two materials, or the target material with the single material and the target material with mixed materials can be co-sputtered simultaneously. The base for placing the target material can adjust the position of the target material; the AZO combination ratio can consequently adjust the position of the target material base in the co-sputtering mode; and the two target materials can simultaneously determine the mixing ratio with different bombardment areas. The invention can analyze the ingredient proportion and characteristics of an actual film, correctly and effectively modulate the AZO components, and can sputter finished products with high light transmittance and good conductivity.
Description
technical field [0001] The invention relates to a method for preparing a conductive film, in particular to a method for preparing a zinc oxide aluminum transparent conductive film. The invention also relates to special equipment for realizing the above-mentioned preparation method, which belongs to the field of film coating. Background technique [0002] With the development of the optoelectronic industry, new materials are constantly being developed. The requirements for various new products are not only light, thin, short, small, high-efficiency and beautiful, but also meet the requirements of light, electricity, magnetism and heat. In addition to functional requirements, if it can have the characteristics of high strength, high toughness, wear resistance, high temperature resistance and corrosion resistance, it can become a product with a more competitive advantage. [0003] Therefore, the high-performance coating technology that adjusts the surface of the product can mee...
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Login to View More IPC IPC(8): C23C14/34C23C14/08C23C14/54
Inventor 徐进成林春园
Owner 徐 进成