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Excimer lamp

An excimer lamp and excimer technology, which is applied in the field of excimer lamps, can solve the problems of peeling off of the end of the ultraviolet reflective film 104 and the like

Active Publication Date: 2012-09-19
USHIO DENKI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] However, in this excimer lamp 100, there is a problem that the end of the ultraviolet reflection film 104 peels off when the lamp is turned on.

Method used

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  • Excimer lamp
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Examples

Experimental program
Comparison scheme
Effect test

experiment example 1

[0052] First, excimer lamps were fabricated with ultraviolet reflection films containing only silica particles as ultraviolet scattering particles, and ultraviolet reflection films with composition ratios of silica particles and alumina particles of 9:1 and 7:3, respectively. The central particle size of the silica particles and alumina particles constituting the ultraviolet reflective film, the transmittance of the ultraviolet reflective film, and the film thickness of the ultraviolet reflective film were measured, and then the excimer lamp was turned on to observe whether the ultraviolet reflective film peeled off.

[0053]The discharge vessel of the excimer lamp used in the experiment is made of synthetic quartz glass, with a size of 10×42×150mm and a thickness of 1.8mm. The enclosed gas is xenon gas, the gas pressure is 30kPa, and the size of the two electrodes is 30×100mm. In addition, the proportion of particles having a central particle diameter among the silica particle...

experiment example 2

[0065] Figure 6 It is a table showing details of six types of excimer lamps 1 to 6 with different particle diameter ranges, central particle diameters, and composition ratios of silica particles and alumina particles of the discharge vessel used in the experiment.

[0066] Figure 7 is for Figure 6 The excimer lamps 1 to 6 shown are graphs of relative illuminance values ​​when the illuminance of vacuum ultraviolet light in the wavelength region of 150 to 200 nm is measured, and the illuminance in the above wavelength region of the excimer lamp without the ultraviolet reflective film is 1.

[0067] The illuminance measurement was carried out as follows: an excimer lamp was fixed on a ceramic support table disposed inside an aluminum container, and an ultraviolet illuminance meter was fixed at a position 1 mm away from the surface of the excimer lamp in a manner opposite to the excimer lamp. In the state where the internal atmosphere of the aluminum container is replaced wit...

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Abstract

The invention provides an excimer lamp, wherein an ultraviolet reflection membrane is capable of transmitting the infrared light and the temperature difference of a discharging container and the ultraviolet reflection membrane is reduced and the ultraviolet reflection membrane is prevented from being peeled and the radiation amount of the excimer light is kept at preset range for long time. The excimer lamp (10) comprises: a discharging container (11) formed by silicon dioxide glass with discharge space and a pair of electrodes (12, 13) in the silicon dioxide glass of the discharging container (11) wherein the discharge space (S) is filled with xenon-133 gas and the excimer discharge happens in the discharge space (S). Exposed on the inner surface of the discharging container (11) of the excimer discharge, the ultraviolet reflection membrane is composed of ultraviolet scattered particles containing silicon dioxide particles and the transmissivity is more than 10% when the light of wavelength 4560nm transmits the ultraviolet reflection membrane and the transmission thickness is 1mm.

Description

technical field [0001] The present invention relates to an excimer lamp including a discharge vessel made of silica glass and a pair of electrodes interposing the silica glass forming the discharge vessel, and excimer discharge occurs in the discharge vessel. Background technique [0002] In recent years, by irradiating vacuum ultraviolet light with a wavelength of 200nm or less on the object to be treated made of metal, glass or other materials, using the effect of vacuum ultraviolet light and the ozone generated thereby, for example, removing the adhesion to the object to be treated Cleaning treatment technology for organic pollutants on the surface of the object, or oxide film formation treatment technology for forming an oxide film on the surface of the object to be treated, and put into practical use the technology for treating the object to be treated. [0003] As a device for irradiating vacuum ultraviolet light, for example, there is known an excimer lamp which forms...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J65/00H01J61/35F21V7/22
CPCH01J5/50H01J9/247H01J61/35H01J65/04H01J65/046H05B41/2806H05B41/2813
Inventor 筱原亚纪子森本幸裕
Owner USHIO DENKI KK