Comb structure micro-mechanical accelerometer based on carbon nano-tube field emission
A technology of field emission and carbon nanotubes, which is applied in the direction of acceleration measurement using inertial force, piezoelectric effect/electrostriction or magnetostriction motor, generator/motor, etc., can solve the difficulty of test circuit implementation, The sensor is difficult to process and the yield rate is not high, and it is suitable for mass production, easy to popularize and apply, and low power consumption.
Inactive Publication Date: 2009-07-01
TSINGHUA UNIV
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Problems solved by technology
At present, the common detection methods mainly include piezoresistive, capacitive, tunnel effect, etc.: piezoresistive detection is to detect acceleration by detecting the change of stress on the sensitive beam; capacitive detection is to detect the capacitance caused by the position change of the mass. The capacitance change is very small, and it is seriously affected by temperature, stray capacitance, electromagnetic interference, etc. It is very difficult to realize the test circuit; the tunnel effect method uses the sensitivity of the tunnel current to the displacement change to detect the acceleration. This kind of sensor is difficult to process, and the current yield is not high.
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Embodiment 1
[0036] Such as Figure 4 As shown, the carbon nanotube field emission-based micromachined accelerometer with a comb structure of the present embodiment is composed of a lower glass plate 20 and a silicon upper silicon plate 10; its production mainly includes the following three steps:
[0037] 1. Fabrication of silicon wafer 10 on silicon:
[0038] 1) Prepare wafer, 4-inch n(100) double-polished silicon wafer, thickness 400μm, resistivity 2-4Ω×cm, cleaned;
[0039] 2) Thermal oxidation of SiO 2 , thick 3000 ;
[0040] 3) 1# plate front photolithography;
[0041] 4) BHF overcorrodes front SiO 2 , to glue;
[0042] 5) KOH corroded the silicon wafer to a depth of 4 μm to form a gap between the beam, the mass block and the lower glass plate, and measured the depth of the shallow groove with a step meter;
[0043] 6) Use K + Wash twice with water cleaning solution, BHF over-corrodes front and back SiO 2 ;
[0044] 7) Inject boron into the front side, dose 5E15, energy 80ke...
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A comb structure micromechanical accelerometer based on field emission of carbon nano-tubes is composed of a silicon upper silicon chip and a lower glass part. The upper silicon chip comprises vertical mobility comb anodes at two opposite side surfaces of a silicon island; N vertical fixed comb carbon nano-tube field emission cathodes fixed on the fixing blocks at the anode of the silicon island, while the cathode is composed of silicon vertical combs and the carbon nano-tube layer deposited at the vertical side sufaces of the combs via deposition, N=1 to 100, and the vertical combs of the anode and the cathode are plugged alternatively, having spaces between the combs; and a dual rectangle beam connected with the silicon fixing blocks connected with two opposite side sufaces of the silicon island. The lower glass sheet is arranged under the upper silicon chip, which are bonded and fused by the metal films splashed or plated between the lower glass sheet and each fixing block via steam in vacuum chamber. The metal films on the fixing blocks are leaded with wiring terminals to connect external detection circuit. The comb structure micromechanical accelerometer has the advantages of simple processing, simple spread, radiation resistance and the resistance for high and low temperature.
Description
technical field [0001] The invention belongs to the field of micro-electromechanical systems and sensing technologies, and in particular relates to a carbon nanotube field emission-based comb tooth structure micro-mechanical accelerometer based on the field emission displacement sensitivity of carbon nanotubes. Background technique [0002] In recent years, micromechanical sensors, especially accelerometers, made by MEMS technology have been widely used in military, automotive, aerospace, medical and other fields due to their advantages of small size, low cost, easy integration and mass production. In aerospace and other fields such as microgravity measurement, since the output signal of the accelerometer is relatively weak, in order to greatly improve the measurement accuracy of the accelerometer, on the one hand, it is necessary to continuously improve the test circuit; The sensor itself is improved. At present, the common detection methods mainly include piezoresistive, ...
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IPC IPC(8): G01P15/08B81B7/02
Inventor 叶雄英陈烽郭琳瑞周兆英
Owner TSINGHUA UNIV