Nozzle system capable of continuously evening chemical vapour deposition of large area

Abstract

The invention discloses a spray head system capable of continuously homogenizing chemical vapor deposition in large area. The system comprises a conveying tube, a fixed panel, a primary reaction gas mixing cavity and a jet tube, wherein the primary reaction gas mixing cavity is arranged at the upper part of the fixed panel; the jet tube is arranged at the lower part of the fixed panel; the jet tube is provided with a jet exhaust; a circulating water cooling system is also arranged at the upper part of the fixed panel; a secondary reaction gas mixing cavity is also arranged at the lower part of the fixed panel; the jet tube is covered in the secondary reaction gas mixing cavity; the cross section of the secondary reaction gas mixing cavity is in a V shape; a monolete nozzle is arranged on the bottom of the secondary reaction gas mixing cavity; and raw material gas enters the primary reaction gas mixing cavity through the conveying tube, enters the jet tube, then enters the secondary reaction gas mixing cavity after the gas is sprayed from the jet exhaust of the jet tube, and finally is sprayed out from the monolete nozzle. The system can lower the deposition temperature so as to lead homogenization of a film to be easily controlled during large-area deposition, thereby ensuring normal running of continuous large-scale production.

Description

technical field [0001] The invention relates to a nozzle system capable of continuous large-area and uniform chemical vapor deposition, which continuously deposits a large-area and uniform transparent conductive film FTO (that is, fluorine-doped element di Tin oxide conductive film) is necessary for the nozzle system. Background technique [0002] As a new type of green energy, solar energy has advantages such as unlimited and no geographical application restrictions, and can be matched with conventional power grids. And it has become an important choice for countries all over the world as a sustainable new energy source. Solar cells directly convert the energy of the part of the sun irradiated on the earth into electrical energy, and it has almost no pollution and impact on the environment. Thin-film solar cells have good semiconductor optoelectronic properties and relatively low overall cost, and large-scale production can make them have an outstanding cost advantage in ...

AI Technical Summary

Problems solved by technology

This structure makes the nozzle 40 from which the mixed reaction gas is ejected always be at a higher temperature. At the same time, too high temperature will cause the mixed gas to react in advance in the mixing chamber 20 or the nozzle 40, which will not only change the reaction The composition of the mixed gas will also correspondingly block the nozzles of the mixing chamber 20 and the nozzle 40 in the nozzle system, and finally cause the prepared film to show macroscopic differences in thickness, composition, and optical and electrical properties of the film. uniform

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