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Method for on-line measuring young modulus of MEMS film based on resonance frequency method

A technology of resonant frequency and Young's modulus, which is applied in the field of online measurement of Young's modulus of micro-electromechanical system thin films and online measurement of Young's modulus of MEMS thin films based on the resonant frequency method, which can solve the problems that affect the success of the test and the measurement error , did not take into account the influence of film stress gradient and other issues

Active Publication Date: 2009-07-29
常熟紫金知识产权服务有限公司
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Problems solved by technology

However, the nano-indentation method will damage the film; the electrostatic absorption method will cause measurement errors due to the accumulation of static electricity after repeated measurements, and it is only suitable for measuring conductive materials; the bubbling method has high requirements for the flatness and roughness of the work surface. The bonding quality between the component and the workbench directly affects the success of the test
Furthermore, none of the previous measurements considered the effect of the film stress gradient

Method used

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  • Method for on-line measuring young modulus of MEMS film based on resonance frequency method
  • Method for on-line measuring young modulus of MEMS film based on resonance frequency method
  • Method for on-line measuring young modulus of MEMS film based on resonance frequency method

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Embodiment Construction

[0040] specific implementation plan

[0041] The present invention will be described in further detail below in conjunction with specific examples and accompanying drawings.

[0042] In actual measurement, such as figure 2 As shown, after depositing a thin layer of SiO 2 On the monocrystalline silicon substrate 2 of layer 4 and silicon nitride layer 5, a layer of phosphosilicate glass (BPSG) with a thickness of 2 μm is deposited as a sacrificial layer 6 by low-pressure chemical vapor deposition (LPCVD), and the sacrificial layer 6 is deposited by photolithography Etch a circular concave hole 7 with a diameter of 2.4 μm on the sacrificial layer, and then deposit a layer of polysilicon film with a thickness of h=0.5 μm as the structural layer 8, centering on the circular concave hole on the sacrificial layer, on the structural layer etch a radius r 0 The center of =25 μm is fixed on the circular MEMS thin film 1 (as figure 1 As shown), after removing the sacrificial layer w...

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Abstract

The invention discloses a method for online measurement of MEMS film young modulus based on a resonant frequency method. The method comprises the following steps: making a center fixed round MEMS film with the radius of r0 and the thickness of h, and fixing an anchor zone of the film on a plane substrate; measuring the resonant frequency f of the center fixed round MEMS film by a micro-motion analyzer; and calculating the young modulus E of the film material. In the method, the center fixed round film with symmetrical center is taken as a test structure and the anchor zone is nearly clamped ideally, thus improving the model precision. The tested film structure can not be damaged in the test process by adopting a non-contact resonant frequency measurement method and the film structure has good repeatability. The method is applicable to measuring the young modulus of conducting materials and non-conducting materials. Furthermore, the measurement method also has the advantages of simple operation, high measurement accuracy, small chip area and the like.

Description

technical field [0001] The invention relates to a method capable of online measuring the Young's modulus of a microelectromechanical system (MEMS) film, specifically a method for online measuring the Young's modulus of a MEMS film based on a resonance frequency method, and belongs to the technical field of MEMS material parameter measurement. Background technique [0002] The application fields of MEMS technology are very broad, and can be used in many fields such as inertial measurement, microfluidics, optics (optical switches, display devices, etc.), pressure measurement, and RF devices. [0003] Thin films are widely used device materials in MEMS. Among the various performance parameters of MEMS films, Young's modulus is the most basic and very important material parameter, which is essential in the research of related MEMS devices. However, due to different film processing techniques and changes in processing conditions, the Young's modulus of the film will also change a...

Claims

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Application Information

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IPC IPC(8): G01N3/00
Inventor 戎华陈涵王鸣
Owner 常熟紫金知识产权服务有限公司
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