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Method and apparatus of forming domain inversion structures in a nonlinear ferroelectric substrate

A substrate, ferroelectric crystal technology, applied in nonlinear optics, chemical instruments and methods, circuits, etc., can solve problems such as uneven polarization and damage to substrates

Inactive Publication Date: 2012-09-05
NANJING CQ LASER TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

A drawback of the reported method is that there is a high risk of conversion to spark discharge or ion beam formation, which may damage the substrate or cause non-uniform polarization

Method used

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  • Method and apparatus of forming domain inversion structures in a nonlinear ferroelectric substrate
  • Method and apparatus of forming domain inversion structures in a nonlinear ferroelectric substrate
  • Method and apparatus of forming domain inversion structures in a nonlinear ferroelectric substrate

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Embodiment Construction

[0011] In a first preferred embodiment, such as image 3 As shown, the preferred crystal polarization device comprises a corona torch 3 positioned over the -c plane of a ferroelectric single crystal with a power source 5 . The substrate 1 is grounded, and the +c surface of the substrate has a periodic electrode pattern 2 . The ferroelectric substrate is set on the sample rack 11 , and the sample rack is connected with the vacuum pump 6 and the temperature controller 8 . Vacuum set at 10 -6 The pressure is between Torr and 1 atmosphere, and the temperature is between room temperature and 200°C. The whole system can be placed in a chamber 12 with a top cover 9 and a bottom cover 10 and the system is connected to a second vacuum pump 7 . The vacuum degree of the second vacuum pump can be set at 10 -3 Torr ~ 1 atmosphere range. The corona torch 3 is connected with a high voltage power supply 5, and supplies N through a gas source 4 2 gas. The voltage supplied by the power s...

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Abstract

A crystal poling apparatus has a single-domain ferroelectric substrate (e.g. MgO doped LiNbO3 substrate), a sample holder, a high voltage source, a corona torch, a gas source, a chamber, and at least one vacuum pump. An electrode with a certain structure (e.g. a periodical pattern) is formed on the first surface of the substrate, and the substrate is set with the electrode facing down on top of the sample holder. The electrode is grounded so that high electric field is formed in the area with electrode due to the formation of charges generated by the corona torch on the second surface of the substrate. The charge distribution on the second surface of the substrate is controlled by the high voltage source and the gas source. To achieve the optimized crystal poling, the temperature of the substrate is set by the temperature controller, and the electrode on the first surface of the substrate is isolated by the vacuum pump.

Description

technical field [0001] The present invention relates to fabricating a domain inversion structure on a ferroelectric substrate, which requires nonlinear optical equipment and other photonic devices, and the nonlinear optical equipment is based on quasi-phase matching (QPM) technology. Background technique [0002] Domain inversion in ferroelectric materials is a key technology for developing optical nonlinear devices such as wavelength converters. An example of the wavelength converter is disclosed in the literature "J.A. Armstrong et al., Physical Review, vol.127, No.6, Sep.15, 1962, pp.1918-1939; C.Q.Xu, et al., Appl. Phys. Lett ., Vol.63, 1993, pp.3559-3561; and K. Gallo, et al., Appl. Phys. Lett., vol.71, 1997, pp.1020-1022". In this document, the wavelength conversion device adopts a wavelength conversion element with a waveguide, in which a periodic domain inversion grating is formed in the direction of the waveguide to satisfy the condition of quasi-phase matching (QP...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/35G02F1/365H01L21/64
CPCC30B33/04G02F1/3558C30B29/30
Inventor 徐长青张仁世乔纳森·马克尔
Owner NANJING CQ LASER TECH
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