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Method for preparing gradient-index film

A gradient refractive index and high refractive index technology, applied in the field of optical thin films, can solve problems such as interface damage performance, degradation, and instability of interface jump characteristics, and achieve the effect of simple process control

Inactive Publication Date: 2009-10-21
ZHEJIANG UNIV
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Problems solved by technology

[0003] Gradient refractive index film, also known as inhomogeneous film, its main feature is that the refractive index changes continuously along the normal direction of the film surface, while the refractive index remains constant in the horizontal direction perpendicular to the normal....Traditional optical film It is designed based on the theoretical model of layered media. However, due to the interface between the film layers, the transition characteristics of the interface and its instability, it is difficult to achieve certain specific spectral properties, and the interface between the film layers is The weak link that forms damage or performance degradation; non-uniform film not only eliminates the interface between film layers, but also greatly increases the control degree of film system design

Method used

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preparation example Construction

[0025] The preparation method for realizing the graded refractive index film comprises the following steps:

[0026] 1) Put the two low-refractive index material reaction precursors into the first reaction precursor container and the third reaction precursor container of the atomic layer deposition coating machine, and put the two high-refractive index material reaction precursors into the atomic layer deposition coating respectively a second reactive precursor container and a fourth reactive precursor container of the machine;

[0027] 2) Heating the substrate of the atomic layer deposition coating machine to 100°C-400°C, vacuuming to 0.1-1Torr, and turning on the atomic layer deposition coating machine;

[0028] 3) Open the first valve P1 and the third valve P3 of the atomic layer deposition coating machine, feed the first reaction precursor and the third reaction precursor respectively, deposit the low refractive index film layer for 1-100 cycles, and obtain the low refract...

Embodiment

[0037] figure 2 It is the technological process of the method for realizing the gradient refractive index film layer of the present invention, specifically as follows:

[0038] The gradient refractive index film layer is prepared, and its refractive index is distributed according to a certain rule, which can be divided into multiple sub-layers, and then these sub-layers are replaced by a combination of extremely thin layers, so that the effect of gradient refractive index can be achieved in a wide wavelength range.

[0039]After loading the substrate into the reaction chamber M1, the treatment temperature of the reaction chamber is maintained between 100° C. and 400° C., preferably between 200° C. and 350° C., and the pressure of the reaction chamber is maintained between 0.1 and 350° C. by means of a heater. Between 1Torr. In successive steps, the process temperature and process pressure are maintained, but the temperature and pressure can be varied if desired, with differe...

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Abstract

The invention discloses a method for preparing a gradient-index film. The method comprises the following steps: 1) putting a high-refractive-index material precursor and a low-refractive-index material precursor into a precursor reaction vessel respectively; 2) heating a substrate, performing vacuum pumping and turning on a coating machine; 3) depositing a low-refractive-index film; 4) depositing a high-refractive-index film; and 5) performing alternate deposition to form the gradient-index film. Compared with the prior art, the method has the following advantages that: 1) the method adopts an atomic-layer deposition technique and realizes sub-films different in refractive index by controlling the parameters of two material deposition processes; 2) the method adopts an alternate deposition mode, controls the number of cycles, and is simple in process control; 3) two film materials are a high-refractive-index film material and a low-refractive-index film material close in deposition temperature; 4) the refractive index of the deposited sub-films can be any value between a high refractive index and a low refractive index; and 5) the refractive-index sub-films are mixed films, and the refractive index can be controlled by controlling the deposition proportion of the two film materials alternately deposited.

Description

technical field [0001] The invention relates to the field of optical thin films, in particular to a preparation method of gradient refractive index thin films. Background technique [0002] In the field of optical films, in order to achieve various required film structures, film materials with various refractive indices are usually required, but the optical film materials that can be used in the preparation of optical films in nature are very limited, and, due to moisture resistance and Due to the hardness of the film layer, there are fewer materials available for high-quality film layers. The present invention uses atomic layer deposition technology to use various high and low refractive index film materials with better performance, and adopts alternate deposition. The method realizes materials with different refractive indices, and realizes different refractive indices through control of process conditions, and the process is simple, the film layer has good stability and r...

Claims

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Application Information

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IPC IPC(8): C23C16/52C23C16/44
Inventor 章岳光何俊鹏沈伟东刘旭
Owner ZHEJIANG UNIV
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