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Short-arc mercury lamp

A mercury lamp, short arc technology, applied in discharge lamps, high pressure discharge lamps, gas discharge lamps, etc., can solve the problems of reducing the solubility of hydrogen, unable to absorb hydrogen effectively, and achieve the effect of suppressing devitrification

Active Publication Date: 2009-12-02
USHIO DENKI KK
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0017] However, yttrium or zirconium is tightly filled in a container such as tantalum, and yttrium or zirconium tends to be in a high-temperature state. As the temperature becomes high, the solubility of hydrogen gas decreases, and hydrogen gas may not be reliably absorbed when the lamp is turned on.

Method used

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Embodiment Construction

[0046] The short-arc mercury lamp of the present invention will be described.

[0047] Such as figure 1 As shown, in the short-arc mercury lamp (hereinafter referred to as lamp) of the present invention, a pair of electrodes 2 and 3 are arranged oppositely in a luminous tube 1 made of quartz glass, wherein 2 is a cathode and 3 is an anode.

[0048] 0.8atm xenon gas and 25mg / cm 3 Mercury, using a direct-current type constant power supply and lighting the lamp with an input power of 9kW and 120A.

[0049] figure 2 yes figure 1 A cutaway view of the cathode side of the lamp is shown.

[0050] The cathode 2 is embedded in the front end of the inner lead 21 and supported by the inner lead.

[0051] In addition, the inner lead 21 and the cathode 2 may be produced by cutting out a single structure, and in this case, the cathode 2 and the inner lead 21 are an integral structure.

[0052] Furthermore, a container 4 having a suction function is attached to the inner lead 21 suppo...

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Abstract

The invention provides a short-arc mercury lamp that absorbs impure gas like oxygen gas and hydrogen gas exist in a luminous tube by a getter effectively so as to emit UV with wavelength 300-350nm favorably. In the short-arc mercury lamp provided in the invention, the luminous tube (1) made of silex glass is sealed with noble gas and quick silver, and is provided with a pair of electrodes (3,3), characterized in that: in an air-tight container (4) made of tantalum or niobium, any one of yttrium, ziroconium and vanadium (42) is sealed together with noble gas; the container (4) is mounted on anelectrode (2). Besides, the characteristics is that the noble gas sealed in the container (4) comprises at least one of argon, krypton and xenon, and pressure P (Pa) sealed in under room temperature is that p bigger than or equal to 70 (Pa).

Description

technical field [0001] The present invention relates to a short-arc mercury lamp, in particular to a short-arc mercury lamp which emits ultraviolet light with a wavelength of 300-350 nm well. Background technique [0002] Short-arc mercury lamps are used as light sources in various exposure processes for semiconductors, liquid crystals, and color filters, and in recent years, they have been required to increase the size of the exposure area and increase productivity. [0003] In addition, ultraviolet rays of g-line (436nm), h-line (404nm), and i-line (365nm) have been mainly used in the past, but in recent years, in order to improve efficiency, ultraviolet rays with shorter wavelengths are required, and ultraviolet rays of 300 to 350nm are used. trend. [0004] In short-arc mercury lamps, cylindrical quartz glass is heated and processed using a hydrogen-oxygen burner to form an approximately spindle-shaped arc tube. During its heating process, water and hydrogen gas are di...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J61/00H01J61/16H01J61/26
CPCG03F7/70016H01J61/06H01J61/0675H01J61/0732H01J61/20H01J61/26H01J61/366H01J61/84H01J61/86
Inventor 安田幸夫
Owner USHIO DENKI KK
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