Corrosive liquid for preparing monocrystal silicon textured surface and method thereof

A technology of etching liquid and monocrystalline silicon, which is applied in the field of solar cells, can solve the problems of easy-to-break production cost, large thickness of monocrystalline silicon, and high cost of isopropanol, and achieve the effects of cost saving, stable properties, and improved conversion efficiency

Inactive Publication Date: 2010-01-27
BEIJING SOLAR ENERGY INST +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, due to the high cost of isopropanol, high volatility, large amount of use, and the need to continuously replenish the solution during the production process, resulting in increased costs
Moreover, th...

Method used

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  • Corrosive liquid for preparing monocrystal silicon textured surface and method thereof
  • Corrosive liquid for preparing monocrystal silicon textured surface and method thereof
  • Corrosive liquid for preparing monocrystal silicon textured surface and method thereof

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Embodiment 1

[0020] Such as Figure 1~3 as shown, Figure 1~3 Be that the temperature of constant temperature bath is 75 ℃, alkaline solution is 1.5 (% by mass percent) sodium hydroxide, 0.12 (% by volume percent) sodium silicate, 0.5 (volume percent) isopropanol, 0.5 (volume percent) concentration is 5*10 -5 ~5*10 -3 The perfluorooctanoate aqueous solution of mol / L, and when corrosion time is 18min, the obtained monocrystalline silicon with pyramid texture, under the microscope observes on the surface of single crystal silicon to form uniform pyramid texture (such as figure 1 shown), and the side length of the pyramid is 0.5-8 μm (such as figure 2 , image 3 shown), the etched thickness on the single crystal silicon is 10 μm.

Embodiment 2

[0022] When the temperature of the constant temperature bath is 85°C, the alkali solution is 1.5 (% mass) sodium hydroxide, 0.12 (% mass) sodium silicate, 0.5 (volume %) isopropanol, and the concentration of 0.5 (% volume) is 5*10 -5 ~5*10 -3 mol / L perfluorooctanoate aqueous solution, and when the etching time is 7 minutes, the side length of the pyramid on the obtained monocrystalline silicon textured surface is 0.5-8 μm, and the etched thickness of the monocrystalline silicon is 10 μm.

[0023] The perfluorooctanoate used in the present invention is an anionic neutral surfactant, which has very high thermodynamic and chemical stability, and can stably and effectively exert its surface activity in special application systems such as strong acid, strong alkali, and strong oxidizing medium It will not react or decompose with the system; PFOA also has good compatibility and can be widely used in various PH value ranges, various water-based and solvent-based systems, and can be...

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Abstract

The invention relates to a corrosive liquid for preparing monocrystal silicon textured surfaces and a method thereof. The corrosive liquid comprises an alkali solution, sodium silicate and isopropanol, and is characterized by also comprising a perfluoro octoate aqueous solution, wherein the perfluoro octoate aqueous solution has the volume percent of 0.2-1 percent and the concentration within a range of 5*10<-5>-5*10<-3>mol/L; the alkali solution has the mass percent of 1-2.5 percent, the sodium silicate has the mass percent of 0.1-2 percent, and the isopropanol has the volume percent of 0.3-2 percent; and the alkali solution is sodium hydroxide or potassium hydroxide or sodium carbonate. The corrosive liquid has low cost, pyramids formed on the prepared monocrystal silicon textured surfaces have small and uniform sizes, and the corrosive liquid is favorable for solar energy absorption and can be widely applied to the field of solar batteries.

Description

technical field [0001] The invention relates to the technical field of solar cells, in particular to an etching solution and a method for preparing monocrystalline silicon textured surfaces. Background technique [0002] Low-cost, high-efficiency solar cells have always been the focus of people's pursuit. Currently, surface texturing of monocrystalline silicon solar cells is one of the effective means to improve the conversion efficiency of solar cells. Usually, the main method of texturing is the alkali etching method. The alkali etching method is to add various buffers, such as isopropanol, ethanol, sodium silicate, etc., to the alkali etching solution to control the reaction rate, so as to obtain For the suede surface with pyramid shape, the smaller and more uniform the size of the pyramid shape, the stronger the light absorption ability of monocrystalline silicon, and the higher the conversion efficiency of solar cells. At present, isopropanol is mainly used as a buffer...

Claims

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Application Information

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IPC IPC(8): C23F1/32C30B33/10H01L31/18
Inventor 许颖勾宪芳励旭东宋爽张燕鹏谢芳吉
Owner BEIJING SOLAR ENERGY INST
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