Process for producing printed wiring board and printed wiring board produced by the production process
一种印刷布线基板、制造方法的技术,应用在印刷电路制造、印刷电路、印刷电路等方向,能够解决铜布线短路、得不到高绝缘电阻等问题,达到高绝缘可靠性、工业效果大的效果
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Embodiment 1~5 and comparative example 1~5
[0093] Hereinafter, the present invention will be described in more detail with reference to examples and comparative examples.
[0094] The Ni-Cr alloy film among the embodiment 1~5, comparative example 1~5 is to use 20% by weight Cr-Ni alloy target (Sumitomo metal Mining Co., Ltd.) was formed with a thickness of 20 to 30 nm by a direct current sputtering method (sputtering device: manufactured by Hirano Koson Co., Ltd.).
[0095] In addition, the copper films in Examples 1 to 5 and Comparative Examples 1 to 5 were formed on the polyimide film in the range of 100 to 120 nm by the DC sputtering method.
[0096] In each of the Examples and Comparative Examples, a predetermined alloy film, metal film, or copper film was separately formed on the polyimide film, so that the alloy film, metal film, or copper film The dissolution properties were evaluated.
[0097] Potassium permanganate was dissolved in ion-exchanged water with a composition shown in the following table to prepar...
Embodiment 6
[0108] Cut out a polyimide film (manufactured by Toray-DuPont Co., film thickness 50 μm) with a size of 12cm×12cm, and use a 7% by weight Cr-Ni alloy target (manufactured by Sumitomo Metal Mining Co., Ltd.) on one side, by DC sputtering A 7% by weight Cr—Ni alloy metal film was formed with a thickness of 20 to 30 nm using a sputtering apparatus: manufactured by Hirano Koson Co., Ltd. An evaluation sample of 50 mm×50 mm was cut out from the obtained alloy film-forming polyimide film. An aqueous solution prepared with 1% by weight of potassium permanganate and 5% by weight of acetic acid was heated to 40° C., and the evaluation sample was dipped for 2 minutes to visually confirm the degree of dissolution of the alloy film. As a result, the dissolution of the alloy film was observed.
Embodiment 7
[0110] In the same manner as in Example 6, a 30% by weight Cr—Ni alloy metal film was formed by direct current sputtering using a 30% by weight Cr—Ni alloy target (manufactured by Sumitomo Metal Mining Co., Ltd.). An evaluation sample of 50 mm×50 mm was cut out from the obtained alloy film-forming polyimide film. An aqueous solution prepared with 1% by weight of potassium permanganate and 5% by weight of acetic acid was heated to 40° C., and the evaluation sample was dipped for 2 minutes to visually confirm the degree of dissolution of the alloy film. As a result, the dissolution of the alloy film was observed.
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