Preparation method of germane

A technology of germane and germanium tetrachloride, which is applied in the field of special gas preparation, can solve the problems of difficult separation and purification, large consumption of raw materials, long process route, etc., and achieve the effect of easy separation and purification, low cost and simple process
CN101723326AInactive Publication Date: 2010-06-09ZHEJIANG SCI-TECH UNIV +1
0 Cites 16 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
ZHEJIANG SCI-TECH UNIV
Publication Date
2010-06-09
Estimated Expiration
Not applicable · inactive patent

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
Patent Text Reader

Abstract

The invention discloses a preparation method of germane, comprising dripping tetrahydrofuran solution of germanium tetrachloride into sodium hydroxide solution of sodium borohydride to react, and preparing the germane; wherein the molar ratio between the germanium tetrachloride and the sodium borohydride is 1:1-10. The reaction is carried out according to the equation: GeCl4+NaBH4+3NaOH=GeH4+B(OH)3+4NaCl. The method is simple in technique and lower in cost; and the prepared germane has high yield and less impurity content, and is easy to purify.
Need to check novelty before this filing date? Find Prior Art

Description

technical field

[0001] The invention relates to a method for preparing a special gas, in particular to a method for preparing germane. Background technique

[0002] As a raw material gas, germane has important uses in the semiconductor industry. Germane is widely used in the manufacture of semiconductor devices such as diodes, transistors and integrated circuits. In addition, germane is also one of the indispensable raw materials for the preparation of infrared optical materials and resistance thermometers. Since the polycrystalline germanium prepared by decomposing germane has less impurity content, high purity and low energy consumption, germane is an important raw material for preparing polycrystalline germanium.

[0003] In recent years, with the rapid development of microelectronics industry, photovoltaic industry and aerospace industry, the demand for germane is increasing.

[0004] At present, the method for preparing germane mainly contains: (1) prepare germane by...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More