Method and apparatus for preparing tungsten hexafluoride using a fluidized bed reactor

A fluidized bed reactor, technology of tungsten hexafluoride, applied in chemical instruments and methods, fluoride preparation, tungsten halide, etc. Uniform distribution constraints and other issues to achieve the effect of reducing volume, increasing contact area, and increasing production

Inactive Publication Date: 2010-06-09
FOOSUNG
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Problems solved by technology

[0011] In the preparation of tungsten hexafluoride, in the case of large-scale production of the previous horizontal tubular reactor, the reaction efficiency is low due to the limited contact area, which increases the processing cost of a large amount of unreacted gas. In addition, when the tungsten is suppli

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  • Method and apparatus for preparing tungsten hexafluoride using a fluidized bed reactor

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[0038] In the present invention, fine particle tungsten powder having a particle diameter of 0.1 to 100 μm is used as tungsten. Tungsten has a very large specific gravity of 19.25g / cm 3 , on the contrary, the tap density of powdered tungsten is low, which is 0.2 ~ 10g / cm 3 Therefore, by spraying gas above a certain pressure from the lower part of the reactor through multiple nozzles, the tungsten powder can float in the reaction space, thereby turning the reactor into a fluidized reaction system. Here, the tap density refers to the density when tungsten powder is injected into the reactor from the end of the tungsten supply pipe (C). After drying the 0.1-100μm tungsten powder, feed it into the reactor through the tungsten supply pipe (C), and select nitrogen (N 2 ), helium (He) and argon (Ar) as the initial fluidization gas. The inert gas introduced needs to have a slightly higher pressure at the beginning, and after the fluidization starts, the pressure drops sharply. Even...

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Abstract

The invention provides a reaction system for preparing tungsten hexafluoride, capable of making the tungsten with specific gravity of 19.25g/cm3 uniformly distributed in the whole reactor, maximizing the contact area of the tungsten and the reaction gas, obviously reducing the volume of the reactor and more easily controlling the reaction heat and obviously improving the reaction efficiency. The invention also provides a method of preparing tungsten hexafluoride by using a fluidized bed reactor through contacting the tungsten with fluorizating agent, comprising the following steps: inputting a tungsten powder into a closed reactor, fluidizing the tungsten powder by injecting pressured inert gas in the reactor and continuously supplying the pressured gaseous fluorizating agent and tungsten powder to make them contact and then react with each other at the fluidized state.

Description

technical field [0001] The invention relates to a method and a device for preparing tungsten hexafluoride by using inert gas in a fluidized bed reactor to carry out fluorination reaction of tungsten powder in a fluidized state. The fluidized bed reactor of the present invention can maximize the contact area necessary for the reaction, can effectively control the reaction temperature, and thus can contribute to greatly improving the conversion rate. Background technique [0002] Tungsten hexafluoride (WF 6 ) is a compound with a low boiling point (BP=19.5°C) and a large specificity, which has the property of direct sublimation from a solid. [0003] Tungsten hexafluoride is used for evaporating tungsten in the semiconductor manufacturing process. In the semiconductor manufacturing process, high-purity tungsten hexafluoride that is not mixed with other impurity metals is required. [0004] Patent Document 1 discloses a method for preparing tungsten hexafluoride by contactin...

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Application Information

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IPC IPC(8): C01G41/04
CPCC01G41/04B01J8/1827B01J2208/00212B01J8/1836B01J8/0055C01B9/08
Inventor 张香子梁钟烈金哲虎赵荣救李定殷饭久保祐一
Owner FOOSUNG
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