Method for preparing amorphous carbon composite coating on surface of hard alloy material and high-speed steel material
A technology of hard alloy and composite coating, which is applied in the direction of metal material coating process, coating, ion implantation plating, etc., to achieve the effect of high hardness, excellent toughness and small friction coefficient
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[0024] Below in conjunction with accompanying drawing, the present invention is described in further detail:
[0025] The invention provides a method for preparing an amorphous tetrahedral carbon composite coating on the surface of hard alloys and high-speed steel materials. The hard alloys and high-speed steel materials are collectively referred to as substrates and include the following steps:
[0026] (1) Pretreatment of the substrate: first degrease the surface of the substrate, then put it into an acetone solution, clean it with ultrasonic waves, dehydrate it with alcohol, and finally dry it with nitrogen;
[0027] (2) insert the pretreated substrate on the special tooling frame 6, put the tooling frame 6 into a tooling turntable 5 in the vacuum chamber 3 of the coating machine; adopt a cold cathode ion source 4 to carry out ion cleaning, and the ion The source is fed with argon gas, the flow rate is 12sccm, and the vacuum chamber pressure is maintained at 2×10 -2 Pa, th...
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