Nano-precision six-degree-of-freedom maglev micro-motion stage and its application

Abstract

Nano-precision six-degree-of-freedom maglev micro-motion table and its application are mainly used in semiconductor lithography equipment. The micro-motion stage contains a cross bracket and four two-degree-of-freedom actuators. Each two-degree-of-freedom actuator includes a permanent magnet polarized in the vertical direction, a horizontal force coil, and a vertical force coil. The permanent magnet is fixed at the end of the cross bracket, and the horizontal force coil and the vertical force coil are respectively arranged on the permanent magnet The side and bottom of the micro-motion table are kept with a gap between the permanent magnets; the cross bracket and four permanent magnets polarized in the vertical direction form the mover of the micro-motion stage; the horizontal force coil and the vertical force coil are respectively fixed by the coil skeleton to form a micro-motion The stator of the moving stage; the stator is fixed on the base of the micro-moving stage. Using two micro-movement stages described above, combined with a two-degree-of-freedom large-stroke linear motor, can constitute a double-silicon wafer stage positioning system for a lithography machine. The invention has the characteristics of simple structure, large driving force, light weight, and no cable disturbance, and is easy to realize high-precision, high-acceleration six-degree-of-freedom micro-motion.

Description

technical field [0001] The invention relates to a nano-precision six-degree-of-freedom maglev micro-motion stage, which is mainly used in semiconductor photolithography equipment and belongs to the technical field of ultra-precision processing and detection equipment. Background technique [0002] With the development of science and technology, the scale used by human beings in the field of manufacturing has changed from micron to nanometer. In this process, the high-precision micro-motion stage undertakes the task of realizing nanometer-level positioning and processing. Nano-precision micro-motion stage generally refers to a motion platform with a stroke of millimeters and a precision of nanometers. According to the development process of nano-precision micro-motion stage drive technology and support technology, there are mainly: piezoelectric ceramic drive, flexible hinge support micro-stage, short-stroke voice coil motor drive, air bearing micro-stage, and Lorentz motor ...

AI Technical Summary

Problems solved by technology

However, the six-degree-of-freedom micro-motion table adopts a combined structure with three degrees of freedom in the horizontal direction and three degrees of freedom in the vertical direction, and uses two layers of permanent magnets in the horizontal direction, and three short-stroke voice coil motors in the vertical direction. As a result, the structure of the six-degree-of-freedom micro-motion table is still relatively complicated

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