Lithium niobate crystal polishing solution and preparation method thereof

A polishing liquid, lithium niobate technology, applied in polishing compositions containing abrasives, etc., can solve the problems of slump, easy scratches, low polishing rate, etc.

Active Publication Date: 2010-10-13
BEIJING GRISH HITECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The invention provides a lithium niobate crystal polishing solution and a preparation method for the problems

Method used

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preparation example Construction

[0021] A kind of preparation method of lithium niobate crystal polishing fluid is characterized in that, comprises the following steps: (1) according to the composition of above-mentioned polishing fluid and its weight percent content preparation; (2) silica sol and deionized water are mixed, Or take silica sol as mother liquor, add deionized water in mother liquor, form silica sol dilution; (3) under the condition of stirring, add ether alcohol surfactant, dispersant, oxidizing agent and pH regulator.

[0022] The invention aims to solve the problems of low polishing rate, prone to scratches and edge collapse during the polishing process of lithium niobate crystals, thereby disclosing a method with simple operation, convenient preparation, strong chemical action, high polishing efficiency and excellent surface roughness. Low and scratch-free polishing fluid for lithium niobate crystals.

[0023] Lithium niobate crystal polishing liquid of the present invention is characteriz...

Embodiment 1

[0043] Describe the preparation process of the present invention with embodiment 1:

[0044] Take 570g of colloidal silica, the particle size is 40-50nm, and the solid content is 20%. Under continuous stirring, add 1.5g of oxidizing agent sodium dichloroisocyanurate (commonly known as UCl) and surfactant fatty alcohol polysaccharide Oxyethylene ether 0.5g, dispersant polyethylene glycol (PEG2000) 2.0g, deionized water 1400g, and finally KOH was added to adjust the pH of the solution to 10.0 to prepare the polishing solution of the present invention. The polishing experiment was carried out with the prepared polishing liquid, and the experiment was carried out on the 2inch lithium niobate wafer on the Logitech PM5 precision grinding and polishing machine, with a pressure of 350g / cm 2 , the rotational speed of the polishing disc is 60r / min, and the flow rate of the polishing liquid is 5ml / min. The surface roughness of the polished lithium niobate wafer was measured with ZYG0502...

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Abstract

The invention discloses lithium niobate crystal polishing solution and a preparation method thereof. The lithium niobate crystal polishing solution is characterized by comprising the following components in percentage by weight: 5 to 50 percent of silicon dioxide, 0.5 to 5 percent of pH regulator, 0.02 to 2 percent of ether alcohol active agent, 0.5 to 5 percent of oxidant, 0.1 to 10 percent of dispersant and the balance of deionized water, wherein the silicon dioxide is added in a state of silicon sol or the silicon sol of the silicon dioxide is used as mother solution for preparing the polishing solution. The polishing solution has the advantages of simple operation, convenient preparation, strong chemical action, high polishing efficiency, low surface roughness and no scratch, and is special for lithium niobate crystals.

Description

technical field [0001] The invention relates to the technical field of chemical mechanical polishing, in particular to a lithium niobate crystal polishing liquid and a preparation method thereof. The molecular formula of the lithium niobate crystal is LiNbO 3 , referred to as LN. In terms of surface ultra-precision machining, the polishing performance of lithium niobate wafers is different from that of silicon wafers, that is, the polishing fluid used for silicon wafers cannot be used as a polishing fluid for lithium niobate wafers Background technique [0002] Lithium niobate crystal (molecular formula LiNbO 3 , referred to as LN) is a functional material with various properties such as ferroelectricity, piezoelectricity, pyroelectricity, electro-optic, acoustoelectricity and photorefractive effects. Because of its high electromechanical coupling coefficient, excellent temperature stability, and low acoustic transmission loss, it is widely used in the production of high-...

Claims

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Application Information

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IPC IPC(8): C09G1/02
Inventor 张永峰王宝运
Owner BEIJING GRISH HITECH
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