Preparation method of solar battery based on nano CdS (Cadmium Sulfide) film
A technology of solar cells and thin films, applied in the manufacture of circuits, electrical components, final products, etc., can solve the problems of loss of light energy, battery efficiency reduction, etc., and achieve the effects of increasing short-circuit current, reducing short-wave loss, and reducing short-wave loss
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Embodiment 1
[0019] (1) Preparation of nano-CdS:O thin films
[0020] SnO 2 :F transparent conductive glass is put into the sample stage of magnetron sputtering instrument, and sputtering target material is high-purity CdS ceramic target (purity 99.99%, wt.%); First vacuumize to 15Pa to sputtering chamber with vacuum pump, then The reaction chamber was evacuated to 7×10 with a molecular pump -4 Pa; A mixed gas of argon and oxygen is introduced, and the flow ratio of argon and oxygen is 5:1. The deposition pressure is 1.5Pa, the sputtering power is 80W, and the CdS film sputtering time is 2 minutes.
[0021] (2) Heat treatment of nanometer CdS:O film
[0022] Put the nano-CdS film into the sample stage of the near-space sublimation deposition equipment; first use the vacuum pump to evacuate the near-space sublimation equipment to 15Pa, and then use the molecular pump to evacuate the reaction chamber to 9×10 -4 Pa, the sublimation source is a high-purity cadmium chloride crystal, the tem...
Embodiment 2
[0027] (1) Preparation of nano-CdS:O thin films
[0028] SnO 2 :F transparent conductive glass is put into the sample stage of magnetron sputtering instrument, and sputtering target material is high-purity CdS ceramic target (purity 99.99%, wt.%); First vacuumize to 15Pa to sputtering chamber with vacuum pump, then The reaction chamber was evacuated to 7×10 with a molecular pump -4 Pa; A mixed gas of argon and oxygen is introduced, and the flow ratio of argon and oxygen is 4:1. The deposition pressure is 1.5Pa, the sputtering power is 80W, and the CdS film sputtering time is 2 minutes.
[0029] (2) Heat treatment of nanometer CdS:O film
[0030] Put the nano-CdS:O film into the sample stage of the near-space sublimation deposition equipment; first use the vacuum pump to evacuate the near-space sublimation equipment to 15Pa, and then use the molecular pump to evacuate the reaction chamber to 9×10 -4 Pa, the sublimation source is a high-purity cadmium chloride crystal, the t...
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