Silicon briquette degumming system and degumming method

Abstract

The invention discloses a silicon briquette degumming system and a degumming method, and the disclosed silicon briquette degumming system comprises a box (21) for accommodating a tooling to be degummed, a degumming reaction chamber (22) for accommodating the box and a heating water tank (23) communicated with inside the box (21), wherein steam generated in the heating water tank (23) is applied on the tooling. The degumming system and the degumming method in the invention can avoid colloid from generating pungent smoke to pollute environment under a high temperature condition, improve workingenvironment of operators, reduce health damage for the operators, lower electrical energy loss by heating water and lessen degumming cost for the silicon briquette. In addition, lock bolts can not betaken down in the degumming process by using steam so as to improve the degumming efficiency of the silicon briquette, reducing installation difficulty of the silicon briquette and enhancing installation efficiency.

Description

technical field [0001] The invention relates to the field of silicon wafer production, in particular to a silicon block degumming system; the invention also relates to a degumming method using the silicon block degumming system. Background technique [0002] Degumming is an essential process in silicon wafer processing. In the process of silicon wafer processing, the silicon block is bonded to the tooling of the multi-wire cutting machine with some kind of glue. In order to ensure the recycling of the tooling, a layer of frosted glass is bonded between the silicon block and the tooling. The tooling is put into a multi-wire cutting machine and cut into silicon wafers. After the cutting is completed, the cut silicon wafers are removed to form silicon block heads and tails. During the refining process of the silicon block head and tail, impurities will deposit and float on the bottom and top of the silicon block. If the silicon material in the impurity area does not meet the u...

AI Technical Summary

Problems solved by technology

[0008] In order to meet the needs, there are a large number of ovens, resulting in high indoor temperature; after the glue is baked at a high temperature of 400 ° C, a large amount of white pungent smoke will be emitted, polluting the environment and causing damage to the operator's body

[0009] 2. Prone to quality accidents

[0010] Each tool needs to be loaded and unloaded with locking screws. If the screws are not fastened in place during the loading and unloading process, displacement is prone to occur during the cutting process. In severe cases, the entire silicon block will be scrapped and unnecessary economic losses will be caused.

[0011] 3. Low production capacity

[0012] After the tooling is baked in an oven, the temperature is high, and it needs to be cooled naturally before it can be used. It takes 40-60 minutes for the tooling to cool down after it is taken out of the oven. burden

Images