Preparation method of amorphous alloy mold and application thereof in micro-flow groove forming
A technology of amorphous alloy and micro-fluid, which is applied in the field of hot-press forming of amorphous alloy mould, to achieve batch precision replication, save production cost, good surface quality and dimensional accuracy
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[0039] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0040] A preparation method of an amorphous alloy mould, comprising the steps of:
[0041] (1) Silicon mold preparation
[0042] The designed micro-channel pattern is etched on the silicon chip with deep reactive ion etching technology to etch a micro-channel female master mold with concave channels. A silicon mold containing a single microfluidic female master mold with a length and width of 5 mm was cut out, washed with acetone and dried. In this example, a silicon mold containing a single microfluidic female master mold is cut out, and a silicon mold containing multiple microfluidic female female molds can also be cut out.
[0043] (2) Preparation of amorphous alloy samples
[0044] Select a Zr-Be based amorphous alloy system with high brittleness value, wide supercooled liquid region, low glass transition temperature, and high temperatur...
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