Method for manufacturing acceleration pole for transmission electron microscope and ceramic rings thereof

Abstract

The invention discloses a method for manufacturing an acceleration pole for a transmission electron microscope and ceramic rings thereof. The manufacturing method comprises the following steps of: (1) ceramic ring formation, namely forming the hollow cylindrical ceramic rings through ceramic powder by adopting an isostatic forming process; (2) metalizing, namely metalizing the formed ceramic rings by adopting a thick film process; and (3) assembly, namely coaxially and fixedly assembling n metalized ceramic rings and n+1 circular sealing metal sheets at intervals together, and fixedly connecting a connecting mechanism capable of being assembled with other components of the transmission electron microscope on the sealing metal sheet at one end after assembly to form the acceleration pole. The ceramic rings have hollow cylindrical appearance, and grooves recessed to the outer walls of the ceramic rings are formed on the inner walls of the ceramic rings along the periphery. The acceleration pole manufacturing method and the ceramic rings thereof can meet the requirements of various properties such as high pressure resistance, tensile strength and the like by combining the ceramic ring forming process and the metalizing process.

Description

technical field [0001] The invention relates to the field of instrumentation (analytical instrument), in particular to a method for manufacturing an accelerating pole of a transmission electron microscope and a ceramic ring thereof. Background technique [0002] Transmission electron microscope (referred to as transmission electron microscope) is an instrument that uses the wave nature of electrons to directly observe the internal atomic structure of solid materials. The transmission electron microscope consists of three parts: the electron optical system (also known as the lens barrel), the vacuum system and the power supply system. Among them, the electron optical system is the basic part of the transmission electron microscope, including electron gun, focusing system, imaging system, amplification system and recording system from top to bottom. [0003] Among them, the electron gun is the illumination source of the transmission electron microscope, and its working enviro...

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Problems solved by technology

[0006] For this reason, the technical problem to be solved by the present invention is that if the molding density of the ceramic ring is too high in the process of manufacturing the accelerator, good metallization will not be achieved, resulting in weak sealing between the ceramic ring and the sealing metal sheet, and insufficient tensile strength. According to the standard, if too much attention is paid to the metallization effect, the density of the ceramic ring will be too low, causing the ceramic ring to be loose in texture, poor in compactness, and unable to meet the withstand voltage requirements, and the ceramic ring in the prior art has short creepage distance and is easy to In order to solve the technical problems of creepage, sparking or breakdown accidents, it is necessary to provide an acceleration device for transmission electron microscopy that combines the ceramic ring forming process with the metallization process and can meet various performance requirements such as high pressure resistance and tensile strength. Extreme manufacturing methods, and ceramic rings with long creepage distance and safe use

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